Abstract
A family of fast time response ion probes has been developed to study the laser -ablation plume dynamics under Y1Ba2Cu3O7-x film -growth conditions. These probes are useful over a wide range of pressures, distances, laser energies, and energy densities. The ion probe measurements are complemented and corroborated by measurements using spatially and temporally resolved optical emission and absorption spectroscopy. The results confirm a long lived ionized component to the plume and a marked slowing of the plasma front at film deposition pressures and distances. Both the ion probe and spectroscopic techniques show promise as sensitive process monitors for film deposition by laser ablation.
Original language | English |
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Pages (from-to) | 172-181 |
Number of pages | 10 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 1187 |
DOIs | |
State | Published - Mar 19 1990 |
Event | Processing of Films for High Tc Superconducting Electronics 1989 - Santa Clara, United States Duration: Oct 10 1989 → Oct 13 1989 |
Funding
The authors would like to thank D. H. Lowndes, C. W. White, S. J. Pennycook, G. K. Werner, D. P. Norton, J. B. Roberto, and R. N. Compton of ORNL for helpful discussions and support. This research was sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract DEAC05-84OR21400 with Martin Marietta Energy Systems, Inc.