Y1Ba2Cu3O7-x laser-ablation plume dynamics measurement by nanosecond response ion probe: Comparison with optical measurements

D. N. Mashburn, D. B. Geohegan

Research output: Contribution to journalConference articlepeer-review

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Abstract

A family of fast time response ion probes has been developed to study the laser -ablation plume dynamics under Y1Ba2Cu3O7-x film -growth conditions. These probes are useful over a wide range of pressures, distances, laser energies, and energy densities. The ion probe measurements are complemented and corroborated by measurements using spatially and temporally resolved optical emission and absorption spectroscopy. The results confirm a long lived ionized component to the plume and a marked slowing of the plasma front at film deposition pressures and distances. Both the ion probe and spectroscopic techniques show promise as sensitive process monitors for film deposition by laser ablation.

Original languageEnglish
Pages (from-to)172-181
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1187
DOIs
StatePublished - Mar 19 1990
EventProcessing of Films for High Tc Superconducting Electronics 1989 - Santa Clara, United States
Duration: Oct 10 1989Oct 13 1989

Funding

The authors would like to thank D. H. Lowndes, C. W. White, S. J. Pennycook, G. K. Werner, D. P. Norton, J. B. Roberto, and R. N. Compton of ORNL for helpful discussions and support. This research was sponsored by the Division of Materials Sciences, U.S. Department of Energy under contract DEAC05-84OR21400 with Martin Marietta Energy Systems, Inc.

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