Xenon and tin pinch discharge sources

Vladimir M. Borisov; Andrey I. Demin; Alexander V. Eltsov; Alexander S. Ivanov; Yuriy B. Kiryukhin; Oleg B. Khristoforov; Valentin A. Mishchenko; Alexander V. Prokofiev; Alexander Yu Vinokhodov; Vladimir A. Vodchits

doi:10.1117/3.613774.Ch16

Xenon and tin pinch discharge sources

Vladimir M. Borisov, Andrey I. Demin, Alexander V. Eltsov, Alexander S. Ivanov, Yuriy B. Kiryukhin, Oleg B. Khristoforov, Valentin A. Mishchenko, Alexander V. Prokofiev, Alexander Yu Vinokhodov, Vladimir A. Vodchits

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

3 Scopus citations

Original language	English
Title of host publication	EUV Sources for Lithography
Publisher	SPIE
Pages	477-504
Number of pages	28
ISBN (Electronic)	9780819480712
ISBN (Print)	0819458457, 9780819458452
DOIs	https://doi.org/10.1117/3.613774.Ch16
State	Published - Feb 23 2006
Externally published	Yes

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10.1117/3.613774.Ch16

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title = "Xenon and tin pinch discharge sources",

author = "Borisov, {Vladimir M.} and Demin, {Andrey I.} and Eltsov, {Alexander V.} and Ivanov, {Alexander S.} and Kiryukhin, {Yuriy B.} and Khristoforov, {Oleg B.} and Mishchenko, {Valentin A.} and Prokofiev, {Alexander V.} and Vinokhodov, {Alexander Yu} and Vodchits, {Vladimir A.}",

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doi = "10.1117/3.613774.Ch16",

language = "English",

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TY - CHAP

T1 - Xenon and tin pinch discharge sources

AU - Borisov, Vladimir M.

AU - Demin, Andrey I.

AU - Eltsov, Alexander V.

AU - Ivanov, Alexander S.

AU - Kiryukhin, Yuriy B.

AU - Khristoforov, Oleg B.

AU - Mishchenko, Valentin A.

AU - Prokofiev, Alexander V.

AU - Vinokhodov, Alexander Yu

AU - Vodchits, Vladimir A.

PY - 2006/2/23

Y1 - 2006/2/23

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U2 - 10.1117/3.613774.Ch16

DO - 10.1117/3.613774.Ch16

M3 - Chapter

AN - SCOPUS:33845436470

SN - 0819458457

SN - 9780819458452

SP - 477

EP - 504

BT - EUV Sources for Lithography

PB - SPIE

ER -

Xenon and tin pinch discharge sources

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