Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

A. V. Melechko; T. E. McKnight; M. A. Guillorn; V. I. Merkulov; B. Ilic; M. J. Doktycz; D. H. Lowndes; M. L. Simpson

doi:10.1063/1.1544058

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

A. V. Melechko, T. E. McKnight, M. A. Guillorn, V. I. Merkulov, B. Ilic, M. J. Doktycz, D. H. Lowndes, M. L. Simpson

Biosciences Division

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33 Scopus citations

Abstract

A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.

Original language	English
Pages (from-to)	976-978
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	6
DOIs	https://doi.org/10.1063/1.1544058
State	Published - Feb 10 2003

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abstract = "A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.",

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AU - Melechko, A. V.

AU - McKnight, T. E.

AU - Guillorn, M. A.

AU - Merkulov, V. I.

AU - Ilic, B.

AU - Doktycz, M. J.

AU - Lowndes, D. H.

AU - Simpson, M. L.

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AB - A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.

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DO - 10.1063/1.1544058

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VL - 82

SP - 976

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JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

Abstract

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