Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

A. V. Melechko; T. E. McKnight; M. A. Guillorn; V. I. Merkulov; B. Ilic; M. J. Doktycz; D. H. Lowndes; M. L. Simpson

doi:10.1063/1.1544058

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

A. V. Melechko
, T. E. McKnight
, M. A. Guillorn
, V. I. Merkulov
, B. Ilic
, M. J. Doktycz
, D. H. Lowndes
, M. L. Simpson

Biosciences Division

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.

Original language	English
Pages (from-to)	976-978
Number of pages	3
Journal	Applied Physics Letters
Volume	82
Issue number	6
DOIs	https://doi.org/10.1063/1.1544058
State	Published - Feb 10 2003

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abstract = "A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.",

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AU - Melechko, A. V.

AU - McKnight, T. E.

AU - Guillorn, M. A.

AU - Merkulov, V. I.

AU - Ilic, B.

AU - Doktycz, M. J.

AU - Lowndes, D. H.

AU - Simpson, M. L.

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N2 - A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.

AB - A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.

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U2 - 10.1063/1.1544058

DO - 10.1063/1.1544058

M3 - Article

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VL - 82

SP - 976

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JO - Applied Physics Letters

JF - Applied Physics Letters

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ER -

Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

Abstract

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