Vertically aligned carbon nanofibers as sacrificial templates for nanofluidic structures

A. V. Melechko, T. E. McKnight, M. A. Guillorn, V. I. Merkulov, B. Ilic, M. J. Doktycz, D. H. Lowndes, M. L. Simpson

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

A method to fabricate nanoscale pipes suitable for fluidic transport was reported. It was found that the vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition were used as sacrificial templates. A high level of control over the nanopipe location, number, length and diameter was provided by this method, permitting them to be deterministically positioned on a substrate and arranged into arrays.

Original languageEnglish
Pages (from-to)976-978
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number6
DOIs
StatePublished - Feb 10 2003

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