Using SSA to measure the efficacy of automated defect data gathering

Kenneth W. Tobin, Shaun S. Gleason, Thomas P. Karnowski, David Guidry

Research output: Contribution to journalArticlepeer-review

3 Scopus citations
Original languageEnglish
Pages (from-to)27-33
Number of pages7
JournalMICRO
Volume16
Issue number4
StatePublished - Apr 1998

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