Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Wen Bin Wu; Hai Tao Ren; Shi Xiang Peng; Yuan Xu; Jia Mei Wen; Jiang Sun; Ai Lin Zhang; Tao Zhang; Jing Feng Zhang; Jia Er Chen

doi:10.1088/1674-1056/26/9/095204

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

Wen Bin Wu, Hai Tao Ren, Shi Xiang Peng, Yuan Xu, Jia Mei Wen, Jiang Sun, Ai Lin Zhang, Tao Zhang, Jing Feng Zhang, Jia Er Chen

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.

Original language	English
Article number	095204
Journal	Chinese Physics B
Volume	26
Issue number	9
DOIs	https://doi.org/10.1088/1674-1056/26/9/095204
State	Published - Aug 2017
Externally published	Yes

Funding

∗Project supported by the National Natural Science Foundation of China (Grant Nos. 11175009 and 11575013). †Corresponding author. E-mail: [email protected]

Funders	Funder number
National Natural Science Foundation of China	11175009, 11575013
National Natural Science Foundation of China

Keywords

electron cyclotron resonance (ECR) ion source
hydrogen plasma
optical emission spectroscopy
plasma diagnosis

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10.1088/1674-1056/26/9/095204

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title = "Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University",

abstract = "Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.",

keywords = "electron cyclotron resonance (ECR) ion source, hydrogen plasma, optical emission spectroscopy, plasma diagnosis",

author = "Wu, {Wen Bin} and Ren, {Hai Tao} and Peng, {Shi Xiang} and Yuan Xu and Wen, {Jia Mei} and Jiang Sun and Zhang, {Ai Lin} and Tao Zhang and Zhang, {Jing Feng} and Chen, {Jia Er}",

note = "Publisher Copyright: {\textcopyright} 2017 Chinese Physical Society and IOP Publishing Ltd.",

year = "2017",

month = aug,

doi = "10.1088/1674-1056/26/9/095204",

language = "English",

volume = "26",

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T1 - Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

AU - Wu, Wen Bin

AU - Ren, Hai Tao

AU - Peng, Shi Xiang

AU - Xu, Yuan

AU - Wen, Jia Mei

AU - Sun, Jiang

AU - Zhang, Ai Lin

AU - Zhang, Tao

AU - Zhang, Jing Feng

AU - Chen, Jia Er

PY - 2017/8

Y1 - 2017/8

N2 - Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.

AB - Optical emission spectroscopy (OES), as a simple in situ method without disturbing the plasma, has been performed for the plasma diagnosis of a 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source at Peking University (PKU). A spectrum measurement platform has been set up with the quartz-chamber electron cyclotron resonance (ECR) ion source [Patent Number: ZL 201110026605.4] and experiments were carried out recently. The electron temperature and electron density inside the ECR plasma chamber have been measured with the method of line intensity ratio of noble gas. Hydrogen plasma processes inside the discharge chamber are discussed based on the diagnostic results. What is more, the superiority of the method of line intensity ratio of noble gas is indicated with a comparison to line intensity ratio of hydrogen. Details will be presented in this paper.

KW - electron cyclotron resonance (ECR) ion source

KW - hydrogen plasma

KW - optical emission spectroscopy

KW - plasma diagnosis

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U2 - 10.1088/1674-1056/26/9/095204

DO - 10.1088/1674-1056/26/9/095204

M3 - Article

AN - SCOPUS:85029010084

SN - 1674-1056

VL - 26

JO - Chinese Physics B

JF - Chinese Physics B

IS - 9

M1 - 095204

ER -

Understanding hydrogen plasma processes based on the diagnostic results of 2.45 GHz ECRIS at Peking University

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