Uncooled thermal imaging using a piezoresistive microcantilever

P. I. Oden; P. G. Datskos; T. Thundat; R. J. Warmack

doi:10.1063/1.117309

Uncooled thermal imaging using a piezoresistive microcantilever

P. I. Oden, P. G. Datskos, T. Thundat, R. J. Warmack

Research output: Contribution to journal › Article › peer-review

91 Scopus citations

Abstract

The operation of an uncooled, microcantilever-based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented.

Original language	English
Pages (from-to)	3277-3279
Number of pages	3
Journal	Applied Physics Letters
Volume	69
Issue number	21
DOIs	https://doi.org/10.1063/1.117309
State	Published - Nov 18 1996
Externally published	Yes

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title = "Uncooled thermal imaging using a piezoresistive microcantilever",

abstract = "The operation of an uncooled, microcantilever-based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented.",

author = "Oden, {P. I.} and Datskos, {P. G.} and T. Thundat and Warmack, {R. J.}",

year = "1996",

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AU - Oden, P. I.

AU - Datskos, P. G.

AU - Thundat, T.

AU - Warmack, R. J.

PY - 1996/11/18

Y1 - 1996/11/18

N2 - The operation of an uncooled, microcantilever-based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented.

AB - The operation of an uncooled, microcantilever-based infrared (IR) imaging device is demonstrated. Bending of the microcantilever is a function of the IR radiation intensity incident on the cantilever surface. The infrared image of the source is obtained by rastering a microfabricated cantilever over the image formed at the focal plane of a concave mirror. The bending variation of the microcantilever, as it scanned the focal plane of the mirror, is used to construct an infrared image of the source in front of the mirror. The thermal image obtained by scanning a single element cantilever is presented.

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DO - 10.1063/1.117309

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EP - 3279

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 21

ER -

Uncooled thermal imaging using a piezoresistive microcantilever

Abstract

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