Uncooled infrared imaging using bimaterial microcantilever arrays

D. Grbovic; N. V. Lavrik; P. G. Datskos; D. Forrai; E. Nelson; J. Devitt; B. McIntyre

doi:10.1063/1.2337083

Uncooled infrared imaging using bimaterial microcantilever arrays

D. Grbovic, N. V. Lavrik, P. G. Datskos, D. Forrai, E. Nelson, J. Devitt, B. McIntyre

Research output: Contribution to journal › Article › peer-review

72 Scopus citations

Abstract

We report on fabrication and characterization of arrays of bimaterial microcantilevers and discuss their performance as uncooled infrared imagers. An optical readout was used to simultaneously measure deflections of all microcantilevers in the array. The fabricated arrays had an average noise equivalent temperature difference (NETD) and a response time of 1.5 K and 6 ms, respectively. Some microcantilevers in the array exhibited NETD values below 500 mK, approaching our theoretical prediction of 151 mK. A unique and valuable feature of the implemented approach is its straightforward scalability to higher resolution arrays, without progressively growing complexity and cost.

Original language	English
Article number	073118
Journal	Applied Physics Letters
Volume	89
Issue number	7
DOIs	https://doi.org/10.1063/1.2337083
State	Published - 2006
Externally published	Yes

Funding

The authors would like to acknowledge support from the Defense Advanced Research Projects Agency. They also would like to acknowledge support from Penn State University Electro-Optics Center and L-3 Communications. This work was partially supported by the Laboratory Director’s Research and Development Program of the Oak Ridge National Laboratory. The Oak Ridge National Laboratory is operated for the U.S. Department of Energy by UT-Battelle under Contract No. DE-AC05-00OR22725.

Funders	Funder number
Penn State University Electro-Optics Center
U.S. Department of Energy
Defense Advanced Research Projects Agency
Oak Ridge National Laboratory
UT-Battelle	DE-AC05-00OR22725

Access to Document

10.1063/1.2337083

Cite this

@article{1f68a3791b7842cea03df92fab0354e2,

title = "Uncooled infrared imaging using bimaterial microcantilever arrays",

abstract = "We report on fabrication and characterization of arrays of bimaterial microcantilevers and discuss their performance as uncooled infrared imagers. An optical readout was used to simultaneously measure deflections of all microcantilevers in the array. The fabricated arrays had an average noise equivalent temperature difference (NETD) and a response time of 1.5 K and 6 ms, respectively. Some microcantilevers in the array exhibited NETD values below 500 mK, approaching our theoretical prediction of 151 mK. A unique and valuable feature of the implemented approach is its straightforward scalability to higher resolution arrays, without progressively growing complexity and cost.",

author = "D. Grbovic and Lavrik, {N. V.} and Datskos, {P. G.} and D. Forrai and E. Nelson and J. Devitt and B. McIntyre",

year = "2006",

doi = "10.1063/1.2337083",

language = "English",

volume = "89",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "7",

}

TY - JOUR

T1 - Uncooled infrared imaging using bimaterial microcantilever arrays

AU - Grbovic, D.

AU - Lavrik, N. V.

AU - Datskos, P. G.

AU - Forrai, D.

AU - Nelson, E.

AU - Devitt, J.

AU - McIntyre, B.

PY - 2006

Y1 - 2006

N2 - We report on fabrication and characterization of arrays of bimaterial microcantilevers and discuss their performance as uncooled infrared imagers. An optical readout was used to simultaneously measure deflections of all microcantilevers in the array. The fabricated arrays had an average noise equivalent temperature difference (NETD) and a response time of 1.5 K and 6 ms, respectively. Some microcantilevers in the array exhibited NETD values below 500 mK, approaching our theoretical prediction of 151 mK. A unique and valuable feature of the implemented approach is its straightforward scalability to higher resolution arrays, without progressively growing complexity and cost.

AB - We report on fabrication and characterization of arrays of bimaterial microcantilevers and discuss their performance as uncooled infrared imagers. An optical readout was used to simultaneously measure deflections of all microcantilevers in the array. The fabricated arrays had an average noise equivalent temperature difference (NETD) and a response time of 1.5 K and 6 ms, respectively. Some microcantilevers in the array exhibited NETD values below 500 mK, approaching our theoretical prediction of 151 mK. A unique and valuable feature of the implemented approach is its straightforward scalability to higher resolution arrays, without progressively growing complexity and cost.

UR - http://www.scopus.com/inward/record.url?scp=33747478640&partnerID=8YFLogxK

U2 - 10.1063/1.2337083

DO - 10.1063/1.2337083

M3 - Article

AN - SCOPUS:33747478640

SN - 0003-6951

VL - 89

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 7

M1 - 073118

ER -

Uncooled infrared imaging using bimaterial microcantilever arrays

Abstract

Funding

Access to Document

Other files and links

Fingerprint

Cite this