Ultrasensitive quartz crystal microbalance enabled by micropillar structure

Pengtao Wang; Junwei Su; Wen Dai; George Cernigliaro; Hongwei Sun

doi:10.1063/1.4862258

Ultrasensitive quartz crystal microbalance enabled by micropillar structure

Pengtao Wang
, Junwei Su
, Wen Dai
, George Cernigliaro
, Hongwei Sun

Research output: Contribution to journal › Article › peer-review

38 Scopus citations

Abstract

We report a method to significantly enhance the mass sensitivity of a quartz crystal microbalance (QCM) device in which Polymethyl Methacrylate (PMMA) micropillars were fabricated on QCM surface to form a two-degrees-of-freedom vibration system. PMMA micropillars were fabricated using nanoimprinting lithography technology. The QCM-micropillar coupled system exhibits a unique resonant frequency, near which the mass sensitivity of QCM can be enhanced by several orders of magnitude. Both numerical simulation and theoretical analysis were conducted to understand this improvement. Thereafter, ultrahigh sensitivity of the QCM-micropillar system was demonstrated by detecting a 1H, 1H, 2H, 2H-perfluorooctyl-trichlorosilane single monolayer film.

Original language	English
Article number	043504
Journal	Applied Physics Letters
Volume	104
Issue number	4
DOIs	https://doi.org/10.1063/1.4862258
State	Published - Jan 27 2014
Externally published	Yes

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10.1063/1.4862258

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title = "Ultrasensitive quartz crystal microbalance enabled by micropillar structure",

abstract = "We report a method to significantly enhance the mass sensitivity of a quartz crystal microbalance (QCM) device in which Polymethyl Methacrylate (PMMA) micropillars were fabricated on QCM surface to form a two-degrees-of-freedom vibration system. PMMA micropillars were fabricated using nanoimprinting lithography technology. The QCM-micropillar coupled system exhibits a unique resonant frequency, near which the mass sensitivity of QCM can be enhanced by several orders of magnitude. Both numerical simulation and theoretical analysis were conducted to understand this improvement. Thereafter, ultrahigh sensitivity of the QCM-micropillar system was demonstrated by detecting a 1H, 1H, 2H, 2H-perfluorooctyl-trichlorosilane single monolayer film.",

author = "Pengtao Wang and Junwei Su and Wen Dai and George Cernigliaro and Hongwei Sun",

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T1 - Ultrasensitive quartz crystal microbalance enabled by micropillar structure

AU - Wang, Pengtao

AU - Su, Junwei

AU - Dai, Wen

AU - Cernigliaro, George

AU - Sun, Hongwei

PY - 2014/1/27

Y1 - 2014/1/27

N2 - We report a method to significantly enhance the mass sensitivity of a quartz crystal microbalance (QCM) device in which Polymethyl Methacrylate (PMMA) micropillars were fabricated on QCM surface to form a two-degrees-of-freedom vibration system. PMMA micropillars were fabricated using nanoimprinting lithography technology. The QCM-micropillar coupled system exhibits a unique resonant frequency, near which the mass sensitivity of QCM can be enhanced by several orders of magnitude. Both numerical simulation and theoretical analysis were conducted to understand this improvement. Thereafter, ultrahigh sensitivity of the QCM-micropillar system was demonstrated by detecting a 1H, 1H, 2H, 2H-perfluorooctyl-trichlorosilane single monolayer film.

AB - We report a method to significantly enhance the mass sensitivity of a quartz crystal microbalance (QCM) device in which Polymethyl Methacrylate (PMMA) micropillars were fabricated on QCM surface to form a two-degrees-of-freedom vibration system. PMMA micropillars were fabricated using nanoimprinting lithography technology. The QCM-micropillar coupled system exhibits a unique resonant frequency, near which the mass sensitivity of QCM can be enhanced by several orders of magnitude. Both numerical simulation and theoretical analysis were conducted to understand this improvement. Thereafter, ultrahigh sensitivity of the QCM-micropillar system was demonstrated by detecting a 1H, 1H, 2H, 2H-perfluorooctyl-trichlorosilane single monolayer film.

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DO - 10.1063/1.4862258

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SN - 0003-6951

VL - 104

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 4

M1 - 043504

ER -

Ultrasensitive quartz crystal microbalance enabled by micropillar structure

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