Abstract
Zinc oxide is a promising semiconductor film for active devices on flexible substrates, and synthesis routes using nanoparticle inks enable greater variety of applications. We introduce and characterize a two-step transient laser annealing process to create fully densified zinc oxide films from nanoparticle ink precursors. A low temperature sub-millisecond calcining step to remove solvent and organic stabilizing ligands was followed by a high-temperature pulsed laser sintering step to form densified 50-100 ran thin films with resistivities of 10 -1 to 10 -3 Ω-cm. Film microstructures can be varied between crystalline and amorphous without significant film damage by adjusting the fluence of the high-temperature sintering step. These processes would be compatible with a variety of nanoparticle species, deposition methods, and patterning methods, including roll-to-roll processing paradigms.
| Original language | English |
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| Title of host publication | High-Speed and Large-Area Printing of Micro/Nanostructures and Devices |
| Pages | 31-36 |
| Number of pages | 6 |
| DOIs | |
| State | Published - 2011 |
| Externally published | Yes |
| Event | 2011 MRS Spring Meeting - San Francisco, CA, United States Duration: Apr 25 2011 → Apr 29 2011 |
Publication series
| Name | Materials Research Society Symposium Proceedings |
|---|---|
| Volume | 1340 |
| ISSN (Print) | 0272-9172 |
Conference
| Conference | 2011 MRS Spring Meeting |
|---|---|
| Country/Territory | United States |
| City | San Francisco, CA |
| Period | 04/25/11 → 04/29/11 |
Funding
The authors would like to thank the National Science Foundation IGERT program for funding this project (NSF-DGE-0654112). We would also like to thank Cornell University user facilities, including: Center for Nanoscale Fabrication (NSF-ECS-0335765), Nanobiotechnology Center (NSF-ECS-9876771), and Cornell Center for Materials Research (NSF-DMR-0520404).