Tuning fifth-order aberrations in a quadrupole-octupole corrector

Andrew R. Lupini; Stephen J. Pennycook

doi:10.1017/S1431927612001237

Tuning fifth-order aberrations in a quadrupole-octupole corrector

Andrew R. Lupini, Stephen J. Pennycook

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.

Original language	English
Pages (from-to)	699-704
Number of pages	6
Journal	Microscopy and Microanalysis
Volume	18
Issue number	4
DOIs	https://doi.org/10.1017/S1431927612001237
State	Published - Aug 2012

Keywords

STEM
aberrations
higher order
spherical aberration

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10.1017/S1431927612001237

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@article{8ba1be401b2a46c08527b889b93efdd1,

title = "Tuning fifth-order aberrations in a quadrupole-octupole corrector",

abstract = "The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.",

keywords = "STEM, aberrations, higher order, spherical aberration",

author = "Lupini, {Andrew R.} and Pennycook, {Stephen J.}",

year = "2012",

month = aug,

doi = "10.1017/S1431927612001237",

language = "English",

volume = "18",

pages = "699--704",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "4",

}

TY - JOUR

T1 - Tuning fifth-order aberrations in a quadrupole-octupole corrector

AU - Lupini, Andrew R.

AU - Pennycook, Stephen J.

PY - 2012/8

Y1 - 2012/8

N2 - The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.

AB - The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.

KW - STEM

KW - aberrations

KW - higher order

KW - spherical aberration

UR - http://www.scopus.com/inward/record.url?scp=84864765903&partnerID=8YFLogxK

U2 - 10.1017/S1431927612001237

DO - 10.1017/S1431927612001237

M3 - Article

AN - SCOPUS:84864765903

SN - 1431-9276

VL - 18

SP - 699

EP - 704

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - 4

ER -

Tuning fifth-order aberrations in a quadrupole-octupole corrector

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Keywords

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