Transmission two-modulator generalized ellipsometry measurements

Gerald E. Jellison, C. Owen Griffiths, David E. Holcomb, Christopher M. Rouleau

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of 40 #x03BC;m. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates.

Original languageEnglish
Pages (from-to)6555-6566
Number of pages12
JournalApplied Optics
Volume41
Issue number31
DOIs
StatePublished - Nov 1 2002

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