Abstract
The prospects for reaching sub-Angstrom electron probes through aberration correction in the scanning transmission electron microscope (STEM) are evaluated. The design, results and practical experience gained from a working 100 keV STEM CS corrector are presented and discussed. The design of a second-generation quadrupole-octupole CS corrector that pays particular attention to the influence of instabilities is outlined. Probe shapes calculated for the new corrector indicate that it will be able to produce a probe smaller than 1 angstrom at 100 keV.
| Original language | English |
|---|---|
| Pages (from-to) | 1-11 |
| Number of pages | 11 |
| Journal | Ultramicroscopy |
| Volume | 78 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1999 |
| Externally published | Yes |
| Event | Proceedings of the 1998 International Workshop Towards Atomic Resolution Analysis, TARA '98 Part 1 : Techniques and Instrumentation - Port Ludlow, WA, USA Duration: Sep 6 1998 → Sep 11 1998 |
Funding
We are grateful to the Paul Instrument Fund of the Royal Society and the IBM T.J. Watson Research Center for financial support of the first- and second-generation C S -correctors, respectively, the Cavendish Laboratory for provision of facilities for the first part of this project, Andrew J. Spence for major contributions to the autotuning software, Prof. L.M. Brown for his inputs, and to Drs. P.E. Batson, S. von Harrach and A. Waye for advice on VG matters.
| Funders | Funder number |
|---|---|
| International Business Machines Corporation | |
| Royal Society |