Towards sub-0.5 angstrom beams through aberration corrected STEM

P. D. Nellist; N. Dellby; O. L. Krivanek; M. F. Murfitt; Z. Szilagyi; A. R. Lupini; S. J. Pennycook

Towards sub-0.5 angstrom beams through aberration corrected STEM

P. D. Nellist
, N. Dellby
, O. L. Krivanek
, M. F. Murfitt
, Z. Szilagyi
, A. R. Lupini
, S. J. Pennycook

electron Microscopy and Microanalysis

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

Correction of spherical aberration (C _s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.

Original language	English
Pages (from-to)	159-164
Number of pages	6
Journal	Institute of Physics Conference Series
Volume	179
State	Published - 2004
Event	Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference - Oxford, United Kingdom Duration: Sep 3 2003 → Sep 5 2003

Cite this

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title = "Towards sub-0.5 angstrom beams through aberration corrected STEM",

abstract = "Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.",

author = "Nellist, \{P. D.\} and N. Dellby and Krivanek, \{O. L.\} and Murfitt, \{M. F.\} and Z. Szilagyi and Lupini, \{A. R.\} and Pennycook, \{S. J.\}",

year = "2004",

language = "English",

volume = "179",

pages = "159--164",

journal = "Institute of Physics Conference Series",

issn = "0951-3248",

note = "Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference ; Conference date: 03-09-2003 Through 05-09-2003",

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TY - JOUR

T1 - Towards sub-0.5 angstrom beams through aberration corrected STEM

AU - Nellist, P. D.

AU - Dellby, N.

AU - Krivanek, O. L.

AU - Murfitt, M. F.

AU - Szilagyi, Z.

AU - Lupini, A. R.

AU - Pennycook, S. J.

PY - 2004

Y1 - 2004

N2 - Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.

AB - Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.

UR - https://www.scopus.com/pages/publications/5044238692

M3 - Conference article

AN - SCOPUS:5044238692

SN - 0951-3248

VL - 179

SP - 159

EP - 164

JO - Institute of Physics Conference Series

JF - Institute of Physics Conference Series

T2 - Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference

Y2 - 3 September 2003 through 5 September 2003

ER -

Towards sub-0.5 angstrom beams through aberration corrected STEM

Abstract

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