Towards sub-0.5 angstrom beams through aberration corrected STEM

P. D. Nellist; N. Dellby; O. L. Krivanek; M. F. Murfitt; Z. Szilagyi; A. R. Lupini; S. J. Pennycook

Towards sub-0.5 angstrom beams through aberration corrected STEM

P. D. Nellist, N. Dellby, O. L. Krivanek, M. F. Murfitt, Z. Szilagyi, A. R. Lupini, S. J. Pennycook

electron Microscopy and Microanalysis

Research output: Contribution to journal › Conference article › peer-review

4 Scopus citations

Abstract

Correction of spherical aberration (C _s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.

Original language	English
Pages (from-to)	159-164
Number of pages	6
Journal	Institute of Physics Conference Series
Volume	179
State	Published - 2004
Event	Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference - Oxford, United Kingdom Duration: Sep 3 2003 → Sep 5 2003

Cite this

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title = "Towards sub-0.5 angstrom beams through aberration corrected STEM",

abstract = "Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.",

author = "Nellist, {P. D.} and N. Dellby and Krivanek, {O. L.} and Murfitt, {M. F.} and Z. Szilagyi and Lupini, {A. R.} and Pennycook, {S. J.}",

year = "2004",

language = "English",

volume = "179",

pages = "159--164",

journal = "Institute of Physics Conference Series",

issn = "0951-3248",

note = "Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference ; Conference date: 03-09-2003 Through 05-09-2003",

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TY - JOUR

T1 - Towards sub-0.5 angstrom beams through aberration corrected STEM

AU - Nellist, P. D.

AU - Dellby, N.

AU - Krivanek, O. L.

AU - Murfitt, M. F.

AU - Szilagyi, Z.

AU - Lupini, A. R.

AU - Pennycook, S. J.

PY - 2004

Y1 - 2004

N2 - Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.

AB - Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.

UR - http://www.scopus.com/inward/record.url?scp=5044238692&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:5044238692

SN - 0951-3248

VL - 179

SP - 159

EP - 164

JO - Institute of Physics Conference Series

JF - Institute of Physics Conference Series

T2 - Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference

Y2 - 3 September 2003 through 5 September 2003

ER -

Towards sub-0.5 angstrom beams through aberration corrected STEM

Abstract

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