Abstract
Correction of spherical aberration (C s) in the scanning transmission electron microscope (STEM) has enabled routine sub-angstrom resolution imaging and increased the current available in an atom-sized probe by a factor of 10 or more. Both high-angle annular dark field (HAADF) imaging and EELS spectrum imaging (SI) results are shown from instruments fitted with Nion aberration correctors.
Original language | English |
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Pages (from-to) | 159-164 |
Number of pages | 6 |
Journal | Institute of Physics Conference Series |
Volume | 179 |
State | Published - 2004 |
Event | Electron Microscopy and Analysis 2003 - Proceedings of the Institute of Physics Electron Microscopy and Analysis Group Conference - Oxford, United Kingdom Duration: Sep 3 2003 → Sep 5 2003 |