Towards sub-Å electron beams

O. L. Krivanek, N. Dellby, A. R. Lupini

Research output: Contribution to journalArticlepeer-review

298 Scopus citations

Abstract

The prospects for reaching sub-Å electron probes through aberration correction in the scanning transmission electron microscope (STEM) are evaluated. The design, results and practical experience gained from a working 100 keV STEM Cs corrector are presented and discussed. The design of a second-generation quadrupole-octupole C(s) corrector that pays particular attention to the influence of instabilities is outlined. Probe shapes calculated for the new corrector indicate that it will be able to produce a probe smaller than 1 Å at 100 keV.

Original languageEnglish
Pages (from-to)1-11
Number of pages11
JournalUltramicroscopy
Volume78
Issue number1-4
DOIs
StatePublished - Jun 1999
Externally publishedYes

Funding

We are grateful to the Paul Instrument Fund of the Royal Society and the IBM T.J. Watson Research Center for financial support of the first- and second-generation C S -correctors, respectively, the Cavendish Laboratory for provision of facilities for the first part of this project, Andrew J. Spence for major contributions to the autotuning software, Prof. L.M. Brown for his inputs, and to Drs. P.E. Batson, S. von Harrach and A. Waye for advice on VG matters.

Keywords

  • Aberration correction
  • Octupoles
  • Quadrupoles
  • STEM

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