Time-resolved study of SrTiO₃ homoepitaxial pulsed-laser deposition using surface x-ray diffraction

Homoepitaxy of SrTiO₃ by pulsed-laser deposition has been studied using in situ time-resolved surface x-ray diffraction in the temperature range of 310°C to 780°C. Using a two-detector configuration, surface x-ray diffraction intensities were monitored simultaneously at the (0 0 1 2) specular and the (0 1 1 2) off-specular truncation rod positions. Abrupt intensity changes in both the specular and off-specular rods after laser pulses indicated prompt crystallization into SrTiO₃ layers followed by slower intra- and interlayer surface rearrangements on time scales of seconds. Specular rod intensity oscillations indicated layer-by-layer growth, while off-specular rod intensity measurements suggested the presence of transient in-plane lattice distortions for depositions above 600°C.