Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

Klaus van Benthem; Andrew R. Lupini; Mark P. Oxley; Scott D. Findlay; Leslie J. Allen; Stephen J. Pennycook

doi:10.1016/j.ultramic.2006.04.020

Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

Klaus van Benthem, Andrew R. Lupini, Mark P. Oxley, Scott D. Findlay, Leslie J. Allen, Stephen J. Pennycook

electron Microscopy and Microanalysis

Research output: Contribution to journal › Article › peer-review

114 Scopus citations

Abstract

Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 × 0.1 × 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.

Original language	English
Pages (from-to)	1062-1068
Number of pages	7
Journal	Ultramicroscopy
Volume	106
Issue number	11-12 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.ultramic.2006.04.020
State	Published - Oct 2006

Keywords

ADF
Optical slicing
STEM

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10.1016/j.ultramic.2006.04.020

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title = "Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy",

abstract = "Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 × 0.1 × 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.",

keywords = "ADF, Optical slicing, STEM",

author = "{van Benthem}, Klaus and Lupini, {Andrew R.} and Oxley, {Mark P.} and Findlay, {Scott D.} and Allen, {Leslie J.} and Pennycook, {Stephen J.}",

year = "2006",

month = oct,

doi = "10.1016/j.ultramic.2006.04.020",

language = "English",

volume = "106",

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journal = "Ultramicroscopy",

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T1 - Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

AU - van Benthem, Klaus

AU - Lupini, Andrew R.

AU - Oxley, Mark P.

AU - Findlay, Scott D.

AU - Allen, Leslie J.

AU - Pennycook, Stephen J.

PY - 2006/10

Y1 - 2006/10

N2 - Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 × 0.1 × 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.

AB - Aberration correction in scanning transmission electron microscopy has more than doubled the lateral resolution, greatly improving the visibility of individual impurity or dopant atoms. Depth resolution is increased five-fold, to the nanometer level. We show how a through-focal series of images enables single Hf atoms to be located inside an advanced gate dielectric device structure to a precision of better than 0.1 × 0.1 × 0.5 nm. This depth sectioning method for three-dimensional characterization has potential applications to many other fields, including polycrystalline materials, catalysts and biological structures.

KW - ADF

KW - Optical slicing

KW - STEM

UR - http://www.scopus.com/inward/record.url?scp=33749234350&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2006.04.020

DO - 10.1016/j.ultramic.2006.04.020

M3 - Article

AN - SCOPUS:33749234350

SN - 0304-3991

VL - 106

SP - 1062

EP - 1068

JO - Ultramicroscopy

JF - Ultramicroscopy

IS - 11-12 SPEC. ISS.

ER -

Three-dimensional ADF imaging of individual atoms by through-focal series scanning transmission electron microscopy

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Keywords

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