Thermoelectric properties and morphology of Si/SiC thin-film multilayers grown by ion beam sputtering

Engineering

• Thin Films 100%
• Silicon Dioxide 100%
• Thermoelectricity 100%
• Thermal Conductivity 66%
• Figure of Merit 66%
• Seebeck Effect 66%
• Ray Diffraction 33%
• Temperature Range 33%
• Layer Thickness 33%
• Conductivity Measurement 33%
• Silicon Substrate 33%
• Room Temperature 33%
• Deposition Process 33%
• Crystallinity 33%
• Multilayer Film 33%
• Electrical Measurement 33%

Material Science

• Film 100%
• Thermoelectrics 100%
• Thin Films 100%
• Thermal Conductivity 66%
• Silicon 66%
• X-Ray Diffraction 33%
• Electrical Resistivity 33%
• Multilayer Film 33%
• Transmission Electron Microscopy 33%
• Scanning Electron Microscopy 33%
• Sputter Deposition 33%