Thermal transpiration at the microscale: A crookes cantilever

A. Passian, R. J. Warmack, T. L. Ferrell, T. Thundat

Research output: Contribution to journalArticlepeer-review

90 Scopus citations

Abstract

The Knudsen forces (KF) were measured with a microcantilever in the capacitive mode. The deflection of the cantilever due to this force was calculated in the free-molecular regime, and the results agree with the observed effect. Presented measurements obey the semiempirical equation given by S(P) for the entire pressure range.

Original languageEnglish
Article number124503
Pages (from-to)124503/1-124503/4
JournalPhysical Review Letters
Volume90
Issue number12
StatePublished - Mar 28 2003

Funding

The authors thank Marvin W. Dotson for technical support in the cantilever readout. This work was supported by the DOE-OBER and DOE-NN22. Oak Ridge National Laboratory, Oak Ridge, Tennessee, 37831-6123, is managed by UT-Battelle, LLC for the Department of Energy under Contract No. DE-AC05-0096OR22725.

FundersFunder number
DOE-OBER37831-6123, DOE-NN22
U.S. Department of Energy

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