Thermal evaporation of thin Li films

Research output: Contribution to journalArticlepeer-review

Abstract

Thermal evaporation of lithium is considered a promising technique for the fabrication of clean lithium thin films for solid-state batteries. Here, we present a practical investigation of nanometer scale lithium films prepared by evaporation on different substrates. These substrates include Li-alloying and nonalloying metals as well as different classes of solid-state lithium-ion conductors. The deposition rate was also varied. For films less than 100 nm thick, the data show that the deposition rate has the biggest impact on the surface coverage. At 50 Å/s, Li forms small particles <1 μm in diameter while higher deposition rate of 150 Å/s resulted in more uniform film morphology on all the substrates. At the lower deposition rates, the wetting of Li to the substrate will impact the particle morphology. We also used the particles to estimate a contact angle between Li and the substrate to qualitatively compare the adhesion from substrate to substrate. The smallest contact angle was observed from lithium films on Li7La3Zr2O12 and LiPON (nominal Li2.94PO3.5N0.31) solid-state electrolytes.

Original languageEnglish
Article number022401
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume43
Issue number2
DOIs
StatePublished - Mar 1 2025

Funding

Funding for this work was provided by the Oak Ridge National Laboratory Directed Research and Development funds and completed with sponsorship from the U.S. Department of Energy (DOE) Vehicle Technology Office (VTO) battery materials research program under Simon Thompson and Tien Duong. SEM imaging was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility.

Fingerprint

Dive into the research topics of 'Thermal evaporation of thin Li films'. Together they form a unique fingerprint.

Cite this