Thermal and ambient-induced deflections of scanning force microscope cantilevers

T. Thundat; R. J. Warmack; G. Y. Chen; D. P. Allison

doi:10.1063/1.111407

Thermal and ambient-induced deflections of scanning force microscope cantilevers

T. Thundat, R. J. Warmack, G. Y. Chen, D. P. Allison

Sensors and Electronics

Research output: Contribution to journal › Article › peer-review

433 Scopus citations

Abstract

The deflection of scanning force microscope cantilevers, metal coated on one side, is significantly influenced by both thermal heating and variations in relative humidity. For constant relative humidity, the deflection of the cantilever drifts due to laser heating and eventually reaches a steady-state value. For a thermally stabilized cantilever, the deflection varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes the inherent deflection of the cantilever. Relative amounts of adsorbates on the cantilever can be estimated from shifts in the cantilever resonance frequency with picogram mass resolution. The cantilever deflection as well as changes in resonance frequency due to vapor adsorption can be used as basis for novel chemical sensors.

Original language	English
Pages (from-to)	2894-2896
Number of pages	3
Journal	Applied Physics Letters
Volume	64
Issue number	21
DOIs	https://doi.org/10.1063/1.111407
State	Published - 1994

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10.1063/1.111407

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title = "Thermal and ambient-induced deflections of scanning force microscope cantilevers",

abstract = "The deflection of scanning force microscope cantilevers, metal coated on one side, is significantly influenced by both thermal heating and variations in relative humidity. For constant relative humidity, the deflection of the cantilever drifts due to laser heating and eventually reaches a steady-state value. For a thermally stabilized cantilever, the deflection varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes the inherent deflection of the cantilever. Relative amounts of adsorbates on the cantilever can be estimated from shifts in the cantilever resonance frequency with picogram mass resolution. The cantilever deflection as well as changes in resonance frequency due to vapor adsorption can be used as basis for novel chemical sensors.",

author = "T. Thundat and Warmack, \{R. J.\} and Chen, \{G. Y.\} and Allison, \{D. P.\}",

year = "1994",

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journal = "Applied Physics Letters",

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AU - Thundat, T.

AU - Warmack, R. J.

AU - Chen, G. Y.

AU - Allison, D. P.

PY - 1994

Y1 - 1994

N2 - The deflection of scanning force microscope cantilevers, metal coated on one side, is significantly influenced by both thermal heating and variations in relative humidity. For constant relative humidity, the deflection of the cantilever drifts due to laser heating and eventually reaches a steady-state value. For a thermally stabilized cantilever, the deflection varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes the inherent deflection of the cantilever. Relative amounts of adsorbates on the cantilever can be estimated from shifts in the cantilever resonance frequency with picogram mass resolution. The cantilever deflection as well as changes in resonance frequency due to vapor adsorption can be used as basis for novel chemical sensors.

AB - The deflection of scanning force microscope cantilevers, metal coated on one side, is significantly influenced by both thermal heating and variations in relative humidity. For constant relative humidity, the deflection of the cantilever drifts due to laser heating and eventually reaches a steady-state value. For a thermally stabilized cantilever, the deflection varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes the inherent deflection of the cantilever. Relative amounts of adsorbates on the cantilever can be estimated from shifts in the cantilever resonance frequency with picogram mass resolution. The cantilever deflection as well as changes in resonance frequency due to vapor adsorption can be used as basis for novel chemical sensors.

UR - https://www.scopus.com/pages/publications/34547239174

U2 - 10.1063/1.111407

DO - 10.1063/1.111407

M3 - Article

AN - SCOPUS:34547239174

SN - 0003-6951

VL - 64

SP - 2894

EP - 2896

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 21

ER -

Thermal and ambient-induced deflections of scanning force microscope cantilevers

Abstract

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