The phase transition of Bi-Pt alloys at the interface of Pt/SrBi2Ta2O9 and its effect on interface roughness

Dong Suk Shin; Ho Nyung Lee; Yong Tae Kim; Young K. Park; In Hoon Choi

The phase transition of Bi-Pt alloys at the interface of Pt/SrBi₂Ta₂O₉ and its effect on interface roughness

Dong Suk Shin, Ho Nyung Lee, Yong Tae Kim, Young K. Park, In Hoon Choi

Research output: Contribution to journal › Article › peer-review

Abstract

Pt/SrBi₂Ta₂O₉(SBT)/CeO₂/Si (MFIS) structures were investigated for observing the change of electrical properties and morphology of interface of Pt/SBT after post-annealing of Pt top electrodes. The morphology of Pt/SBT interface became smooth and Bi oxide was formed at the bottom of Pt top electrode after post-annealing Pt top electrode. In order to describe the origin of these changes, Bi-oxide/Pt/SiO₂/Si structure was investigated with annealing temperatures about the reaction between Bi oxide and Pt. We can describe that the smooth interface of Pt/SBT and the consumption of metallic Bi, which the reason why electrical properties were drastically improved, is induced by the melting of Pt-Bi alloys and formation of Bi-oxide after post-annealing Pt top electrode.

Original language	English
Pages (from-to)	173-178
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	541
State	Published - 1999
Externally published	Yes

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title = "The phase transition of Bi-Pt alloys at the interface of Pt/SrBi2Ta2O9 and its effect on interface roughness",

abstract = "Pt/SrBi2Ta2O9(SBT)/CeO2/Si (MFIS) structures were investigated for observing the change of electrical properties and morphology of interface of Pt/SBT after post-annealing of Pt top electrodes. The morphology of Pt/SBT interface became smooth and Bi oxide was formed at the bottom of Pt top electrode after post-annealing Pt top electrode. In order to describe the origin of these changes, Bi-oxide/Pt/SiO2/Si structure was investigated with annealing temperatures about the reaction between Bi oxide and Pt. We can describe that the smooth interface of Pt/SBT and the consumption of metallic Bi, which the reason why electrical properties were drastically improved, is induced by the melting of Pt-Bi alloys and formation of Bi-oxide after post-annealing Pt top electrode.",

author = "Shin, {Dong Suk} and Lee, {Ho Nyung} and Kim, {Yong Tae} and Park, {Young K.} and Choi, {In Hoon}",

year = "1999",

language = "English",

volume = "541",

pages = "173--178",

journal = "Materials Research Society Symposium - Proceedings",

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TY - JOUR

T1 - The phase transition of Bi-Pt alloys at the interface of Pt/SrBi2Ta2O9 and its effect on interface roughness

AU - Shin, Dong Suk

AU - Lee, Ho Nyung

AU - Kim, Yong Tae

AU - Park, Young K.

AU - Choi, In Hoon

PY - 1999

Y1 - 1999

N2 - Pt/SrBi2Ta2O9(SBT)/CeO2/Si (MFIS) structures were investigated for observing the change of electrical properties and morphology of interface of Pt/SBT after post-annealing of Pt top electrodes. The morphology of Pt/SBT interface became smooth and Bi oxide was formed at the bottom of Pt top electrode after post-annealing Pt top electrode. In order to describe the origin of these changes, Bi-oxide/Pt/SiO2/Si structure was investigated with annealing temperatures about the reaction between Bi oxide and Pt. We can describe that the smooth interface of Pt/SBT and the consumption of metallic Bi, which the reason why electrical properties were drastically improved, is induced by the melting of Pt-Bi alloys and formation of Bi-oxide after post-annealing Pt top electrode.

AB - Pt/SrBi2Ta2O9(SBT)/CeO2/Si (MFIS) structures were investigated for observing the change of electrical properties and morphology of interface of Pt/SBT after post-annealing of Pt top electrodes. The morphology of Pt/SBT interface became smooth and Bi oxide was formed at the bottom of Pt top electrode after post-annealing Pt top electrode. In order to describe the origin of these changes, Bi-oxide/Pt/SiO2/Si structure was investigated with annealing temperatures about the reaction between Bi oxide and Pt. We can describe that the smooth interface of Pt/SBT and the consumption of metallic Bi, which the reason why electrical properties were drastically improved, is induced by the melting of Pt-Bi alloys and formation of Bi-oxide after post-annealing Pt top electrode.

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M3 - Article

AN - SCOPUS:0032592361

SN - 0272-9172

VL - 541

SP - 173

EP - 178

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

ER -

The phase transition of Bi-Pt alloys at the interface of Pt/SrBi₂Ta₂O₉ and its effect on interface roughness

Abstract

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