The effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields

J. B.O. Caughman, D. N. Ruzic, D. J. Hoffman

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Original language	English
Pages (from-to)	2301-2304
Number of pages	4
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574440
State	Published - Jul 1 1987
Externally published	Yes

Access to Document

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title = "The effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields",

author = "Caughman, \{J. B.O.\} and Ruzic, \{D. N.\} and Hoffman, \{D. J.\}",

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T1 - The effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields

AU - Caughman, J. B.O.

AU - Ruzic, D. N.

AU - Hoffman, D. J.

PY - 1987/7/1

Y1 - 1987/7/1

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JO - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

IS - 4

ER -