The effects of radio frequency waves on the sputtering of ion cyclotron resonance heating antenna Faraday shields

J. B.O. Caughman, D. N. Ruzic, D. J. Hoffman

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Original language	English
Pages (from-to)	2301-2304
Number of pages	4
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574440
State	Published - Jul 1 1987
Externally published	Yes

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author = "Caughman, {J. B.O.} and Ruzic, {D. N.} and Hoffman, {D. J.}",

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AU - Ruzic, D. N.

AU - Hoffman, D. J.

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