The effects of layering in ferroelectric Si-doped HfO2 thin films

  • Patrick D. Lomenzo
  • , Qanit Takmeel
  • , Chuanzhen Zhou
  • , Yang Liu
  • , Chris M. Fancher
  • , Jacob L. Jones
  • , Saeed Moghaddam
  • , Toshikazu Nishida

Research output: Contribution to journalArticlepeer-review

61 Scopus citations

Fingerprint

Dive into the research topics of 'The effects of layering in ferroelectric Si-doped HfO2 thin films'. Together they form a unique fingerprint.

Material Science

Engineering