Abstract
The defect structures of sapphire (α-Al2O3) implanted with iron at room temperature and 1000 °C were determined by Rutherford backscattering spectroscopy/ion channelling and transmission electron microscopy. Crystals with the c-axis normal to the surface were implanted with 1×1017 Fe/cm2 (150 keV). Samples implanted at RT were then annealed at 1000 °C in a reducing atmosphere. Implantation at RT produced precipitates, identified as α-Fe, 1-3 nm in size and the typical "black spot" damage. Implantation at 1000 °C produced little residual disorder and a microstructure containing faceted iron precipitates ranging in size to 100 nm. Voids were associated with many of the precipitates. A second population of voids in the size range of 5-15 nm was also present. Annealing produced a microstructure containing 1-60 nm faceted precipitates but fewer voids.
Original language | English |
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Pages (from-to) | 227-231 |
Number of pages | 5 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 218 |
Issue number | 1-4 |
DOIs | |
State | Published - Jun 2004 |
Event | Proceedings of the Twelfth International Conference on Radiation - Gramado, Brazil Duration: Aug 31 2003 → Sep 5 2003 |
Funding
Research sponsored in part by US Department of Energy, Division of Materials Sciences, and the Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Transportation Technologies, as part of the High Temperature Materials Laboratory User Program at the Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the US Department of Energy under contract number DE-AC05-00OR22725.
Keywords
- Nanoclusters
- RBS-C
- Sapphire
- TEM