The effect of RuO2Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 thin films

Seung Hyun Kim; J. G. Hong; S. K. Streiffer; Angus I. Kingon

doi:10.1557/JMR.1999.0135

The effect of RuO₂Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(Zr_xTi_1-x)O₃ thin films

Seung Hyun Kim
, J. G. Hong
, S. K. Streiffer
, Angus I. Kingon

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

We have investigated the effect of RuO₂ (10, 30, 50 nm)/Pt layered hybrid bottom electrode structure and film composition on the leakage and fatigue properties of chemical solution derived Pb(Zr_xTi_1-x)O₃ (PZT) thin films. It was observed that the use of high Ti content (Zr:Ti = 30:70) films with control of excess PbO at the thin RuO₂ (10 nm)/Pt bottom electrode surface reduced leakage current and showed good fatigue properties with high remanent polarization compared to the use of high Zr films (Zr:Ti = 50:50) or thicker RuO₂ (30, 50 nm)/Pt bottom electrodes. Typical P-E hysteresis behavior of PZT films was observed even at an applied voltage of 3 V, demonstrating greatly improved remanence and coercivity. Fatigue and breakdown characteristics of these modified PZT thin films (Zr:Ti = 30:70) on RuO₂ (10 nm)/Pt, measured at 5 V, showed stable behavior, and less than 15% fatigue degradation was observed up to 10¹⁰ cycles.

Original language	English
Pages (from-to)	1018-1025
Number of pages	8
Journal	Journal of Materials Research
Volume	14
Issue number	3
DOIs	https://doi.org/10.1557/JMR.1999.0135
State	Published - Mar 1999
Externally published	Yes

Funding

This work was supported by Ramtron Corporation. A gift from LG Semicon is gratefully acknowledged. Useful discussions with other members of the Kingon research group are also gratefully acknowledged.

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10.1557/JMR.1999.0135

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title = "The effect of RuO2Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 thin films",

abstract = "We have investigated the effect of RuO2 (10, 30, 50 nm)/Pt layered hybrid bottom electrode structure and film composition on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 (PZT) thin films. It was observed that the use of high Ti content (Zr:Ti = 30:70) films with control of excess PbO at the thin RuO2 (10 nm)/Pt bottom electrode surface reduced leakage current and showed good fatigue properties with high remanent polarization compared to the use of high Zr films (Zr:Ti = 50:50) or thicker RuO2 (30, 50 nm)/Pt bottom electrodes. Typical P-E hysteresis behavior of PZT films was observed even at an applied voltage of 3 V, demonstrating greatly improved remanence and coercivity. Fatigue and breakdown characteristics of these modified PZT thin films (Zr:Ti = 30:70) on RuO2 (10 nm)/Pt, measured at 5 V, showed stable behavior, and less than 15\% fatigue degradation was observed up to 1010 cycles.",

author = "Kim, \{Seung Hyun\} and Hong, \{J. G.\} and Streiffer, \{S. K.\} and Kingon, \{Angus I.\}",

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AU - Kim, Seung Hyun

AU - Hong, J. G.

AU - Streiffer, S. K.

AU - Kingon, Angus I.

PY - 1999/3

Y1 - 1999/3

N2 - We have investigated the effect of RuO2 (10, 30, 50 nm)/Pt layered hybrid bottom electrode structure and film composition on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 (PZT) thin films. It was observed that the use of high Ti content (Zr:Ti = 30:70) films with control of excess PbO at the thin RuO2 (10 nm)/Pt bottom electrode surface reduced leakage current and showed good fatigue properties with high remanent polarization compared to the use of high Zr films (Zr:Ti = 50:50) or thicker RuO2 (30, 50 nm)/Pt bottom electrodes. Typical P-E hysteresis behavior of PZT films was observed even at an applied voltage of 3 V, demonstrating greatly improved remanence and coercivity. Fatigue and breakdown characteristics of these modified PZT thin films (Zr:Ti = 30:70) on RuO2 (10 nm)/Pt, measured at 5 V, showed stable behavior, and less than 15% fatigue degradation was observed up to 1010 cycles.

AB - We have investigated the effect of RuO2 (10, 30, 50 nm)/Pt layered hybrid bottom electrode structure and film composition on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 (PZT) thin films. It was observed that the use of high Ti content (Zr:Ti = 30:70) films with control of excess PbO at the thin RuO2 (10 nm)/Pt bottom electrode surface reduced leakage current and showed good fatigue properties with high remanent polarization compared to the use of high Zr films (Zr:Ti = 50:50) or thicker RuO2 (30, 50 nm)/Pt bottom electrodes. Typical P-E hysteresis behavior of PZT films was observed even at an applied voltage of 3 V, demonstrating greatly improved remanence and coercivity. Fatigue and breakdown characteristics of these modified PZT thin films (Zr:Ti = 30:70) on RuO2 (10 nm)/Pt, measured at 5 V, showed stable behavior, and less than 15% fatigue degradation was observed up to 1010 cycles.

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The effect of RuO₂Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(Zr_xTi_1-x)O₃ thin films

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