Abstract
We have investigated the effect of RuO2 (10, 30, 50 nm)/Pt layered hybrid bottom electrode structure and film composition on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 (PZT) thin films. It was observed that the use of high Ti content (Zr:Ti = 30:70) films with control of excess PbO at the thin RuO2 (10 nm)/Pt bottom electrode surface reduced leakage current and showed good fatigue properties with high remanent polarization compared to the use of high Zr films (Zr:Ti = 50:50) or thicker RuO2 (30, 50 nm)/Pt bottom electrodes. Typical P-E hysteresis behavior of PZT films was observed even at an applied voltage of 3 V, demonstrating greatly improved remanence and coercivity. Fatigue and breakdown characteristics of these modified PZT thin films (Zr:Ti = 30:70) on RuO2 (10 nm)/Pt, measured at 5 V, showed stable behavior, and less than 15% fatigue degradation was observed up to 1010 cycles.
| Original language | English |
|---|---|
| Pages (from-to) | 1018-1025 |
| Number of pages | 8 |
| Journal | Journal of Materials Research |
| Volume | 14 |
| Issue number | 3 |
| DOIs | |
| State | Published - Mar 1999 |
| Externally published | Yes |
Funding
This work was supported by Ramtron Corporation. A gift from LG Semicon is gratefully acknowledged. Useful discussions with other members of the Kingon research group are also gratefully acknowledged.