@inproceedings{e6471f686e8444f9b7611a511c8bbf8f,
title = "The application of spatial signature analysis to electrical test data: Validation study",
keywords = "Automation, Electrical test, Image processing, Process signatures, Wafermap analysis, Yield learning",
author = "TP Karnowski and KW Tobin and SS Gleason and F Lakhani",
year = "1999",
doi = "10.1117/12.350840",
language = "American English",
pages = "530--541",
editor = "B Singh",
booktitle = "Metrology, Inspection, And Process Control For Microlithography Xiii, Pts 1 And 2",
}