Temperature measurements of polyimide during KrF excimer laser ablation

D. P. Brunco; Michael O. Thompson; C. E. Otis; P. M. Goodwin

doi:10.1063/1.352198

Temperature measurements of polyimide during KrF excimer laser ablation

D. P. Brunco, Michael O. Thompson, C. E. Otis, P. M. Goodwin

Research output: Contribution to journal › Article › peer-review

59 Scopus citations

Abstract

The temperature at the interface between a thin polyimide film and a quartz substrate was monitored as a function of time during KrF (248 nm) laser-induced heating and ablation using thin film NiSi thermistors. These experimental temperature measurements were coupled with heat flow simulations to obtain time-resolved temperature profiles in the polyimide. Thermal properties of the polyimide were estimated by requiring that the simulations reproduce experimental temperature profiles. The peak surface temperature of the polyimide at the onset of ablation was subsequently estimated from these constrained simulations and a value of 1660±100 K was obtained for the observed ablation threshold fluence of 36 mJ/cm².

Original language	English
Pages (from-to)	4344-4350
Number of pages	7
Journal	Journal of Applied Physics
Volume	72
Issue number	9
DOIs	https://doi.org/10.1063/1.352198
State	Published - 1992
Externally published	Yes

Access to Document

10.1063/1.352198

Cite this

@article{4e7acce03e3c444aa2f72a278781d790,

title = "Temperature measurements of polyimide during KrF excimer laser ablation",

abstract = "The temperature at the interface between a thin polyimide film and a quartz substrate was monitored as a function of time during KrF (248 nm) laser-induced heating and ablation using thin film NiSi thermistors. These experimental temperature measurements were coupled with heat flow simulations to obtain time-resolved temperature profiles in the polyimide. Thermal properties of the polyimide were estimated by requiring that the simulations reproduce experimental temperature profiles. The peak surface temperature of the polyimide at the onset of ablation was subsequently estimated from these constrained simulations and a value of 1660±100 K was obtained for the observed ablation threshold fluence of 36 mJ/cm2.",

author = "Brunco, \{D. P.\} and Thompson, \{Michael O.\} and Otis, \{C. E.\} and Goodwin, \{P. M.\}",

year = "1992",

doi = "10.1063/1.352198",

language = "English",

volume = "72",

pages = "4344--4350",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "9",

}

TY - JOUR

T1 - Temperature measurements of polyimide during KrF excimer laser ablation

AU - Brunco, D. P.

AU - Thompson, Michael O.

AU - Otis, C. E.

AU - Goodwin, P. M.

PY - 1992

Y1 - 1992

N2 - The temperature at the interface between a thin polyimide film and a quartz substrate was monitored as a function of time during KrF (248 nm) laser-induced heating and ablation using thin film NiSi thermistors. These experimental temperature measurements were coupled with heat flow simulations to obtain time-resolved temperature profiles in the polyimide. Thermal properties of the polyimide were estimated by requiring that the simulations reproduce experimental temperature profiles. The peak surface temperature of the polyimide at the onset of ablation was subsequently estimated from these constrained simulations and a value of 1660±100 K was obtained for the observed ablation threshold fluence of 36 mJ/cm2.

AB - The temperature at the interface between a thin polyimide film and a quartz substrate was monitored as a function of time during KrF (248 nm) laser-induced heating and ablation using thin film NiSi thermistors. These experimental temperature measurements were coupled with heat flow simulations to obtain time-resolved temperature profiles in the polyimide. Thermal properties of the polyimide were estimated by requiring that the simulations reproduce experimental temperature profiles. The peak surface temperature of the polyimide at the onset of ablation was subsequently estimated from these constrained simulations and a value of 1660±100 K was obtained for the observed ablation threshold fluence of 36 mJ/cm2.

UR - https://www.scopus.com/pages/publications/0026946056

U2 - 10.1063/1.352198

DO - 10.1063/1.352198

M3 - Article

AN - SCOPUS:0026946056

SN - 0021-8979

VL - 72

SP - 4344

EP - 4350

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 9

ER -

Temperature measurements of polyimide during KrF excimer laser ablation

Abstract

Access to Document

Other files and links

Fingerprint

Cite this