Temperature-dependent growth window of CaTiO3 films grown by hybrid molecular beam epitaxy

Joseph Roth; Eddy Arriaga; Matthew Brahlek; Jason Lapano; Roman Engel-Herbert

doi:10.1116/1.5011384

Temperature-dependent growth window of CaTiO₃ films grown by hybrid molecular beam epitaxy

Joseph Roth, Eddy Arriaga, Matthew Brahlek, Jason Lapano, Roman Engel-Herbert

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

The authors report the effects of growth temperature on the self-regulated growth window of CaTiO₃ thin films grown by hybrid molecular beam epitaxy (hMBE). Films were grown on (001) (La_0.3Sr_0.7)(Al_0.65Ta_0.35)O₃ at temperatures between 700 and 950 °C. Calcium was supplied by a standard thermal effusion cell, while the metalorganic precursor titanium tetra-isopropoxide (TTIP) was used as the titanium source. The stoichiometric growth conditions were mapped using a combination of x-ray diffraction, reflection high energy electron diffraction, and atomic force microscopy. It is found that the growth window widened and shifted to higher TTIP fluxes with increasing temperature. Further, the shift of the growth window edge to Ti-rich conditions is three times larger than the growth window edge to Ca-rich conditions, which is discussed in general terms of the kinetic processes involved in hMBE.

Original language	English
Article number	020601
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	36
Issue number	2
DOIs	https://doi.org/10.1116/1.5011384
State	Published - Mar 1 2018
Externally published	Yes

Funding

J.R. and R.E.H. acknowledge funding from the National Science Foundation through DMR-1629477 and the National Science Foundation through the Penn State MRSEC Program DMR-1420620 for the XRD and AFM measurements and preparation of this manuscript. E.A. acknowledges support through NSF-PREM DMR-1523588 for film growth. M.B. acknowledges the Department of Energy (Grant No. DE-SC0012375) for film growth and preparation of this manuscript. J.M.L. acknowledges the Penn State MRSEC Program DMR-1420620 for the film growth.

Funders	Funder number
National Science Foundation	DMR-1420620, DMR-1629477
U.S. Department of Energy
National Science Foundation

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abstract = "The authors report the effects of growth temperature on the self-regulated growth window of CaTiO3 thin films grown by hybrid molecular beam epitaxy (hMBE). Films were grown on (001) (La0.3Sr0.7)(Al0.65Ta0.35)O3 at temperatures between 700 and 950 °C. Calcium was supplied by a standard thermal effusion cell, while the metalorganic precursor titanium tetra-isopropoxide (TTIP) was used as the titanium source. The stoichiometric growth conditions were mapped using a combination of x-ray diffraction, reflection high energy electron diffraction, and atomic force microscopy. It is found that the growth window widened and shifted to higher TTIP fluxes with increasing temperature. Further, the shift of the growth window edge to Ti-rich conditions is three times larger than the growth window edge to Ca-rich conditions, which is discussed in general terms of the kinetic processes involved in hMBE.",

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AB - The authors report the effects of growth temperature on the self-regulated growth window of CaTiO3 thin films grown by hybrid molecular beam epitaxy (hMBE). Films were grown on (001) (La0.3Sr0.7)(Al0.65Ta0.35)O3 at temperatures between 700 and 950 °C. Calcium was supplied by a standard thermal effusion cell, while the metalorganic precursor titanium tetra-isopropoxide (TTIP) was used as the titanium source. The stoichiometric growth conditions were mapped using a combination of x-ray diffraction, reflection high energy electron diffraction, and atomic force microscopy. It is found that the growth window widened and shifted to higher TTIP fluxes with increasing temperature. Further, the shift of the growth window edge to Ti-rich conditions is three times larger than the growth window edge to Ca-rich conditions, which is discussed in general terms of the kinetic processes involved in hMBE.

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Temperature-dependent growth window of CaTiO₃ films grown by hybrid molecular beam epitaxy

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