Technique for production of calibrated metal hydride films

R. A. Langley; J. F. Browning

doi:10.1116/1.1376710

Technique for production of calibrated metal hydride films

R. A. Langley, J. F. Browning

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A technique was proposed for the production of metal hydride films with known amounts of hydrogen isotopes. Metal occluder film of a particular thickness was deposited and loaded with a known gas composition. The volumes of various parts of the loading system were determined using physical vapor transport measurements. The technique was found to be suitable for the growth of metal hydride films with different hydrogen isotope ratios with an uncertainty of 2%.

Original language	English
Pages (from-to)	2706-2708
Number of pages	3
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	5
DOIs	https://doi.org/10.1116/1.1376710
State	Published - 2001
Externally published	Yes

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title = "Technique for production of calibrated metal hydride films",

abstract = "A technique was proposed for the production of metal hydride films with known amounts of hydrogen isotopes. Metal occluder film of a particular thickness was deposited and loaded with a known gas composition. The volumes of various parts of the loading system were determined using physical vapor transport measurements. The technique was found to be suitable for the growth of metal hydride films with different hydrogen isotope ratios with an uncertainty of 2%.",

author = "Langley, {R. A.} and Browning, {J. F.}",

year = "2001",

doi = "10.1116/1.1376710",

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AU - Browning, J. F.

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AB - A technique was proposed for the production of metal hydride films with known amounts of hydrogen isotopes. Metal occluder film of a particular thickness was deposited and loaded with a known gas composition. The volumes of various parts of the loading system were determined using physical vapor transport measurements. The technique was found to be suitable for the growth of metal hydride films with different hydrogen isotope ratios with an uncertainty of 2%.

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U2 - 10.1116/1.1376710

DO - 10.1116/1.1376710

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SN - 0734-2101

VL - 19

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JO - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

IS - 5

ER -

Technique for production of calibrated metal hydride films

Abstract

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