Abstract
The International Atomic Energy Agency has sponsored a formal intercomparison exercise for the seven depth profiling ion beam analysis codes, which are: GISA, RUMP, RBX, DEPTH, DataFurnace, SIMNRA and MCERD. This intercomparison is published in Nucl. Instr. and Meth. B [N.P. Barradas, K. Arstila, G. Battistig, M. Bianconi, N. Dytlewski, C. Jeynes, E. Kótai, G. Lulli, M. Mayer, E. Rauhala, E. Szilágyi, M. Thompson, Nucl. Instr. and Meth. B 262 (2007) 281-303] and summarised here. The codes implement all known physical effects and they are all evaluated. We demonstrate that there is agreement between codes often better than 0.1%; and also detailed agreement with real spectra, showing in particular that the SRIM 2003 stopping powers for Si are correct to 0.6% for 1.5 MeV He. For the case of heavy ion elastic recoil detection (HI-ERD) the single scattering codes performed poorly for scattered particles, although recoiled particles were calculated correctly.
| Original language | English |
|---|---|
| Pages (from-to) | 1338-1342 |
| Number of pages | 5 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 266 |
| Issue number | 8 |
| DOIs | |
| State | Published - Apr 2008 |
| Externally published | Yes |
Funding
We would like to thank the IAEA for supporting this intercomparison exercise, Dr. Alexander Gurbich for providing some scattering cross-sections. Work is partially supported by the Hungarian OTKA Grant No.: T 046238 and the UK EPSRC Grant GR/R50097.
Keywords
- Channelling
- Computer software
- Data analysis
- EBS
- ERDA
- Glancing geometry
- Ion beam analysis
- Monte Carlo
- Multiple scattering
- NDF
- NRA
- RBS
- Resonance
- Roughness
- Silicon
- Simulation
- Stopping power
- Straggling