Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy

Vladimir I. Merkulov; Douglas H. Lowndes; G. E. Jellison; A. A. Puretzky; D. B. Geohegan

doi:10.1063/1.122515

Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy

Vladimir I. Merkulov, Douglas H. Lowndes, G. E. Jellison, A. A. Puretzky, D. B. Geohegan

Functional Hybrid Nanomaterials

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Abstract

Amorphous carbon films with variable sp³ content were produced by ArF (193 nm) pulsed laser deposition. Electron energy loss spectroscopy and spectroscopic ellipsometry were employed to systematically study changes in the bonding and optical properties of the carbon films as a function of the kinetic energy of ablated C ions, which was measured using an ion probe. The measurements reveal that the films with the most diamond-like properties are obtained at the C ion kinetic energy of ∼90 eV. In contrast to measurements made as a function of laser fluence, ion probe measurements of kinetic energy are a convenient as well as more accurate and fundamental method for monitoring deposition conditions, with the advantage of being readily transferable for interlaboratory comparisons.

Original language	English
Pages (from-to)	2591-2593
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	18
DOIs	https://doi.org/10.1063/1.122515
State	Published - 1998

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title = "Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy",

abstract = "Amorphous carbon films with variable sp3 content were produced by ArF (193 nm) pulsed laser deposition. Electron energy loss spectroscopy and spectroscopic ellipsometry were employed to systematically study changes in the bonding and optical properties of the carbon films as a function of the kinetic energy of ablated C ions, which was measured using an ion probe. The measurements reveal that the films with the most diamond-like properties are obtained at the C ion kinetic energy of ∼90 eV. In contrast to measurements made as a function of laser fluence, ion probe measurements of kinetic energy are a convenient as well as more accurate and fundamental method for monitoring deposition conditions, with the advantage of being readily transferable for interlaboratory comparisons.",

author = "Merkulov, {Vladimir I.} and Lowndes, {Douglas H.} and Jellison, {G. E.} and Puretzky, {A. A.} and Geohegan, {D. B.}",

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doi = "10.1063/1.122515",

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pages = "2591--2593",

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T1 - Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy

AU - Merkulov, Vladimir I.

AU - Lowndes, Douglas H.

AU - Jellison, G. E.

AU - Puretzky, A. A.

AU - Geohegan, D. B.

PY - 1998

Y1 - 1998

N2 - Amorphous carbon films with variable sp3 content were produced by ArF (193 nm) pulsed laser deposition. Electron energy loss spectroscopy and spectroscopic ellipsometry were employed to systematically study changes in the bonding and optical properties of the carbon films as a function of the kinetic energy of ablated C ions, which was measured using an ion probe. The measurements reveal that the films with the most diamond-like properties are obtained at the C ion kinetic energy of ∼90 eV. In contrast to measurements made as a function of laser fluence, ion probe measurements of kinetic energy are a convenient as well as more accurate and fundamental method for monitoring deposition conditions, with the advantage of being readily transferable for interlaboratory comparisons.

AB - Amorphous carbon films with variable sp3 content were produced by ArF (193 nm) pulsed laser deposition. Electron energy loss spectroscopy and spectroscopic ellipsometry were employed to systematically study changes in the bonding and optical properties of the carbon films as a function of the kinetic energy of ablated C ions, which was measured using an ion probe. The measurements reveal that the films with the most diamond-like properties are obtained at the C ion kinetic energy of ∼90 eV. In contrast to measurements made as a function of laser fluence, ion probe measurements of kinetic energy are a convenient as well as more accurate and fundamental method for monitoring deposition conditions, with the advantage of being readily transferable for interlaboratory comparisons.

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M3 - Article

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VL - 73

SP - 2591

EP - 2593

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

ER -

Structure and optical properties of amorphous diamond films prepared by ArF laser ablation as a function of carbon ion kinetic energy

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