Structural and optical characterization of fluorinated hydrogenated silicon carbide films deposited by pulsed glow discharge

  • L. G. Jacobsohn
  • , D. F. Franceschini
  • , I. V. Afanasyev-Charkin
  • , D. W. Cooke
  • , L. L. Daemen
  • , R. D. Averitt
  • , M. Nastasi

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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