Structural and optical characterization of fluorinated hydrogenated silicon carbide films deposited by pulsed glow discharge

L. G. Jacobsohn, D. F. Franceschini, I. V. Afanasyev-Charkin, D. W. Cooke, L. L. Daemen, R. D. Averitt, M. Nastasi

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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