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Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application

  • Hiroshi Nakaki
  • , Rikyu Ikariyama
  • , Yong Kwan Kim
  • , Shintaro Yokoyama
  • , Ken Nishida
  • , Alexei Gruverman
  • , Stephen Streiffer
  • , Keisuke Saito
  • , Hiroshi Funakubo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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