Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application

Hiroshi Nakaki; Rikyu Ikariyama; Yong Kwan Kim; Shintaro Yokoyama; Ken Nishida; Alexei Gruverman; Stephen Streiffer; Keisuke Saito; Hiroshi Funakubo

doi:10.1109/ISAF.2007.4393301

Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application

Hiroshi Nakaki, Rikyu Ikariyama, Yong Kwan Kim, Shintaro Yokoyama, Ken Nishida, Alexei Gruverman, Stephen Streiffer, Keisuke Saito, Hiroshi Funakubo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

(100)/(001)-oriented epitaxial PbTiO₃ films were grown on (100) SrTiO₃ and (100) Nb-SrTiO₃ substrates by MOCVD. The detailed domain structure of these films was analyzed by X-ray diffraction pattern and piezoresponse force microscopy. In thick films (over 1.1 μm), much more complex domain structure has been observed compared to thin films. Domain structures of thick films consist of one kind of c-domains (c ₁) and three kinds of a-domains (a₁, a₂ and a₃). The tilting angles of a₂/a₃ and a ₁/c₁ boundaries are about 3.6° which corresponds to the inclination angle given by geometric calculation, 2arctan(c/a)-90°, where a and c are lattice parameters of strain-free state of PbTiO₃. Other domain boundaries, a₂/c₁ and a₁/a ₃, are strained ones with rotation, and have not been observed in thinner films. It is assumed that this complex domain structure was formed through the strain relaxation of thick PbTiO₃ films.

Original language	English
Title of host publication	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Pages	469-471
Number of pages	3
DOIs	https://doi.org/10.1109/ISAF.2007.4393301
State	Published - 2007
Externally published	Yes
Event	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF - Nara-city, Japan Duration: May 27 2007 → May 31 2007

Publication series

Name	IEEE International Symposium on Applications of Ferroelectrics

Conference

Conference	2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF
Country/Territory	Japan
City	Nara-city
Period	05/27/07 → 05/31/07

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10.1109/ISAF.2007.4393301

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Nakaki, H., Ikariyama, R., Kim, Y. K., Yokoyama, S., Nishida, K., Gruverman, A., Streiffer, S., Saito, K., & Funakubo, H. (2007). Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF (pp. 469-471). Article 4393301 (IEEE International Symposium on Applications of Ferroelectrics). https://doi.org/10.1109/ISAF.2007.4393301

@inproceedings{2fa5c1e92e654be295911e8183d99383,

title = "Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application",

abstract = "(100)/(001)-oriented epitaxial PbTiO3 films were grown on (100) SrTiO3 and (100) Nb-SrTiO3 substrates by MOCVD. The detailed domain structure of these films was analyzed by X-ray diffraction pattern and piezoresponse force microscopy. In thick films (over 1.1 μm), much more complex domain structure has been observed compared to thin films. Domain structures of thick films consist of one kind of c-domains (c 1) and three kinds of a-domains (a1, a2 and a3). The tilting angles of a2/a3 and a 1/c1 boundaries are about 3.6° which corresponds to the inclination angle given by geometric calculation, 2arctan(c/a)-90°, where a and c are lattice parameters of strain-free state of PbTiO3. Other domain boundaries, a2/c1 and a1/a 3, are strained ones with rotation, and have not been observed in thinner films. It is assumed that this complex domain structure was formed through the strain relaxation of thick PbTiO3 films.",

author = "Hiroshi Nakaki and Rikyu Ikariyama and Kim, {Yong Kwan} and Shintaro Yokoyama and Ken Nishida and Alexei Gruverman and Stephen Streiffer and Keisuke Saito and Hiroshi Funakubo",

year = "2007",

doi = "10.1109/ISAF.2007.4393301",

language = "English",

isbn = "1424413338",

series = "IEEE International Symposium on Applications of Ferroelectrics",

pages = "469--471",

booktitle = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF",

note = "2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF ; Conference date: 27-05-2007 Through 31-05-2007",

}

Nakaki, H, Ikariyama, R, Kim, YK, Yokoyama, S, Nishida, K, Gruverman, A, Streiffer, S, Saito, K & Funakubo, H 2007, Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application. in 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF., 4393301, IEEE International Symposium on Applications of Ferroelectrics, pp. 469-471, 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF, Nara-city, Japan, 05/27/07. https://doi.org/10.1109/ISAF.2007.4393301

Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application. / Nakaki, Hiroshi; Ikariyama, Rikyu; Kim, Yong Kwan et al.
2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 469-471 4393301 (IEEE International Symposium on Applications of Ferroelectrics).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application

AU - Nakaki, Hiroshi

AU - Ikariyama, Rikyu

AU - Kim, Yong Kwan

AU - Yokoyama, Shintaro

AU - Nishida, Ken

AU - Gruverman, Alexei

AU - Streiffer, Stephen

AU - Saito, Keisuke

AU - Funakubo, Hiroshi

PY - 2007

Y1 - 2007

N2 - (100)/(001)-oriented epitaxial PbTiO3 films were grown on (100) SrTiO3 and (100) Nb-SrTiO3 substrates by MOCVD. The detailed domain structure of these films was analyzed by X-ray diffraction pattern and piezoresponse force microscopy. In thick films (over 1.1 μm), much more complex domain structure has been observed compared to thin films. Domain structures of thick films consist of one kind of c-domains (c 1) and three kinds of a-domains (a1, a2 and a3). The tilting angles of a2/a3 and a 1/c1 boundaries are about 3.6° which corresponds to the inclination angle given by geometric calculation, 2arctan(c/a)-90°, where a and c are lattice parameters of strain-free state of PbTiO3. Other domain boundaries, a2/c1 and a1/a 3, are strained ones with rotation, and have not been observed in thinner films. It is assumed that this complex domain structure was formed through the strain relaxation of thick PbTiO3 films.

AB - (100)/(001)-oriented epitaxial PbTiO3 films were grown on (100) SrTiO3 and (100) Nb-SrTiO3 substrates by MOCVD. The detailed domain structure of these films was analyzed by X-ray diffraction pattern and piezoresponse force microscopy. In thick films (over 1.1 μm), much more complex domain structure has been observed compared to thin films. Domain structures of thick films consist of one kind of c-domains (c 1) and three kinds of a-domains (a1, a2 and a3). The tilting angles of a2/a3 and a 1/c1 boundaries are about 3.6° which corresponds to the inclination angle given by geometric calculation, 2arctan(c/a)-90°, where a and c are lattice parameters of strain-free state of PbTiO3. Other domain boundaries, a2/c1 and a1/a 3, are strained ones with rotation, and have not been observed in thinner films. It is assumed that this complex domain structure was formed through the strain relaxation of thick PbTiO3 films.

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U2 - 10.1109/ISAF.2007.4393301

DO - 10.1109/ISAF.2007.4393301

M3 - Conference contribution

AN - SCOPUS:51349110189

SN - 1424413338

SN - 9781424413331

T3 - IEEE International Symposium on Applications of Ferroelectrics

SP - 469

EP - 471

BT - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

T2 - 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF

Y2 - 27 May 2007 through 31 May 2007

ER -

Nakaki H, Ikariyama R, Kim YK, Yokoyama S, Nishida K, Gruverman A et al. Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application. In 2007 16th IEEE International Symposium on the Applications of Ferroelectrics, ISAF. 2007. p. 469-471. 4393301. (IEEE International Symposium on Applications of Ferroelectrics). doi: 10.1109/ISAF.2007.4393301

Structural analysis in (100)/(001)-oriented epitaxial lead titanate thick films grown by MOCVD for MEMS application

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