Sputter deposition of SiC coating on silicon wafers

M. T. Robson, C. A. Blue, S. G. Warrier, R. Y. Lin

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish
Pages (from-to)565-570
Number of pages6
JournalScripta Metallurgica et Materiala
Volume27
Issue number5
DOIs
StatePublished - Sep 1 1992
Externally publishedYes

Funding

*Research sponsored by NASA Space Engineering Research Center. The authors would like to thank NASA Space Engineering Center for the support of this project. Both Dr. Larry Cooper and Dr. Stanley Rubin have been instrumental to successful development of this project. We would also like to express our appreciation to Dr. Dan Williams of NASA Lewis Research Center and his group in helping with the scratch testing of the coated samples. Mr. John Whitaker's assistance in installing the Sputter Unit is also deeply gratified.

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