Spatially resolved laser absorption spectroscopy on a micro-hollow cathode He plasma

Keisuke Ueno; Kenta Kamebuchi; Jiro Kakutani; Leo Matsuoka; Shinichi Namba; Keisuke Fujii; Taiichi Shikama; Masahiro Hasuo

doi:10.7567/1347-4065/aaec19

Spatially resolved laser absorption spectroscopy on a micro-hollow cathode He plasma

Keisuke Ueno, Kenta Kamebuchi, Jiro Kakutani, Leo Matsuoka, Shinichi Namba, Keisuke Fujii, Taiichi Shikama, Masahiro Hasuo

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We performed laser absorption spectroscopy on a micro-hollow cathode He plasma with a diameter of 1.0 mm for the two transitions; 2³S-2³P (1083 nm) and 2¹P-3¹D (667.8 nm) simultaneously, at gas pressures of 5-60 kPa. We fitted the two-transition spectra with a superposed Voigt function, and evaluated 2³S and 2¹P atom densities, gas temperature, and electron density. We evaluated the two-dimensional maps of these parameters at respective gas pressures. It is found that the 2³S and 2¹P atom densities are high in the center of the plasma at low pressures, and are high near the cathode-wall at high pressures. In addition, the ratio of the values between the bulk and the sheath for the 2³S and 2¹P atom densities is quite different at the same gas pressure, which may result from the difference in the direct electron-excitation rates.

Original language	English
Article number	SAAB03
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	58
Issue number	SA
DOIs	https://doi.org/10.7567/1347-4065/aaec19
State	Published - Feb 2019
Externally published	Yes

Funding

This work was partly supported by JSPS KAKENHI Grant-in-Aid for Challenging Exploratory Research (No. 15K13607) and the Kansai Research Foundation for technology promotion (No. 2015R035).

Funders	Funder number
Kansai Research Foundation for technology promotion	2015R035
Japan Society for the Promotion of Science	15K13607

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10.7567/1347-4065/aaec19

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title = "Spatially resolved laser absorption spectroscopy on a micro-hollow cathode He plasma",

abstract = "We performed laser absorption spectroscopy on a micro-hollow cathode He plasma with a diameter of 1.0 mm for the two transitions; 23S-23P (1083 nm) and 21P-31D (667.8 nm) simultaneously, at gas pressures of 5-60 kPa. We fitted the two-transition spectra with a superposed Voigt function, and evaluated 23S and 21P atom densities, gas temperature, and electron density. We evaluated the two-dimensional maps of these parameters at respective gas pressures. It is found that the 23S and 21P atom densities are high in the center of the plasma at low pressures, and are high near the cathode-wall at high pressures. In addition, the ratio of the values between the bulk and the sheath for the 23S and 21P atom densities is quite different at the same gas pressure, which may result from the difference in the direct electron-excitation rates.",

author = "Keisuke Ueno and Kenta Kamebuchi and Jiro Kakutani and Leo Matsuoka and Shinichi Namba and Keisuke Fujii and Taiichi Shikama and Masahiro Hasuo",

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doi = "10.7567/1347-4065/aaec19",

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T1 - Spatially resolved laser absorption spectroscopy on a micro-hollow cathode He plasma

AU - Ueno, Keisuke

AU - Kamebuchi, Kenta

AU - Kakutani, Jiro

AU - Matsuoka, Leo

AU - Namba, Shinichi

AU - Fujii, Keisuke

AU - Shikama, Taiichi

AU - Hasuo, Masahiro

PY - 2019/2

Y1 - 2019/2

N2 - We performed laser absorption spectroscopy on a micro-hollow cathode He plasma with a diameter of 1.0 mm for the two transitions; 23S-23P (1083 nm) and 21P-31D (667.8 nm) simultaneously, at gas pressures of 5-60 kPa. We fitted the two-transition spectra with a superposed Voigt function, and evaluated 23S and 21P atom densities, gas temperature, and electron density. We evaluated the two-dimensional maps of these parameters at respective gas pressures. It is found that the 23S and 21P atom densities are high in the center of the plasma at low pressures, and are high near the cathode-wall at high pressures. In addition, the ratio of the values between the bulk and the sheath for the 23S and 21P atom densities is quite different at the same gas pressure, which may result from the difference in the direct electron-excitation rates.

AB - We performed laser absorption spectroscopy on a micro-hollow cathode He plasma with a diameter of 1.0 mm for the two transitions; 23S-23P (1083 nm) and 21P-31D (667.8 nm) simultaneously, at gas pressures of 5-60 kPa. We fitted the two-transition spectra with a superposed Voigt function, and evaluated 23S and 21P atom densities, gas temperature, and electron density. We evaluated the two-dimensional maps of these parameters at respective gas pressures. It is found that the 23S and 21P atom densities are high in the center of the plasma at low pressures, and are high near the cathode-wall at high pressures. In addition, the ratio of the values between the bulk and the sheath for the 23S and 21P atom densities is quite different at the same gas pressure, which may result from the difference in the direct electron-excitation rates.

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Spatially resolved laser absorption spectroscopy on a micro-hollow cathode He plasma

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