Spatial resolution and information transfer in scanning transmission electron microscopy

Yiping Peng, Mark P. Oxley, Andrew R. Lupini, Matthew F. Chisholm, Stephen J. Pennycook

Research output: Contribution to journalArticlepeer-review

29 Scopus citations

Abstract

The relation between image resolution and information transfer is explored. It is shown that the existence of higher frequency transfer in the image is just a necessary but not sufficient condition for the achievement of higher resolution. Adopting a two-point resolution criterion, we suggest that a 10% contrast level between two features in an image should be used as a practical definition of resolution. In the context of scanning transmission electron microscopy, it is shown that the channeling effect does not have a direct connection with image resolution because sharp channeling peaks do not move with the scanning probe. Through a quantitative comparison between experimental image and simulation, a Fourier-space approach is proposed to estimate defocus and sample thickness. The effective atom size in Z-contrast imaging depends on the annular detector's inner angle. Therefore, an optimum angle exists for the highest resolution as a trade-off between reduced atom size and reduced signal with limited information transfer due to noise.

Original languageEnglish
Pages (from-to)36-47
Number of pages12
JournalMicroscopy and Microanalysis
Volume14
Issue number1
DOIs
StatePublished - Feb 2008

Keywords

  • ADF
  • Defocus
  • Detector inner angle
  • Information transfer
  • Noise
  • Resolution
  • STEM
  • Thickness

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