Silicon Tetrafluoride Vapor Pressure Study

D. E. Hanson; C. M. Santos

doi:10.2172/1908063

Silicon Tetrafluoride Vapor Pressure Study

D. E. Hanson, C. M. Santos

Research output: Other contribution › Technical Report

Abstract

The vapor pressure (VP) of silicon tetrafluoride (SiF4) was evaluated using three different cryogenic cold baths and multiple pressure transducers (PTs). Through this experiment, the known range of VP has been extended to a low temperature of 122 K. A functional relationship for the VP has been developed for the range between 122 and 159.6 K. This relationship was also used to estimate a VP value at 88 K, which was below observable levels with a 0.1 torr gauge.

Original language	English
Place of Publication	United States
DOIs	https://doi.org/10.2172/1908063
State	Published - 2022

Keywords

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

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10.2172/1908063

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title = "Silicon Tetrafluoride Vapor Pressure Study",

abstract = "The vapor pressure (VP) of silicon tetrafluoride (SiF4) was evaluated using three different cryogenic cold baths and multiple pressure transducers (PTs). Through this experiment, the known range of VP has been extended to a low temperature of 122 K. A functional relationship for the VP has been developed for the range between 122 and 159.6 K. This relationship was also used to estimate a VP value at 88 K, which was below observable levels with a 0.1 torr gauge.",

keywords = "37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY",

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year = "2022",

doi = "10.2172/1908063",

language = "English",

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T1 - Silicon Tetrafluoride Vapor Pressure Study

AU - Hanson, D. E.

AU - Santos, C. M.

PY - 2022

Y1 - 2022

N2 - The vapor pressure (VP) of silicon tetrafluoride (SiF4) was evaluated using three different cryogenic cold baths and multiple pressure transducers (PTs). Through this experiment, the known range of VP has been extended to a low temperature of 122 K. A functional relationship for the VP has been developed for the range between 122 and 159.6 K. This relationship was also used to estimate a VP value at 88 K, which was below observable levels with a 0.1 torr gauge.

AB - The vapor pressure (VP) of silicon tetrafluoride (SiF4) was evaluated using three different cryogenic cold baths and multiple pressure transducers (PTs). Through this experiment, the known range of VP has been extended to a low temperature of 122 K. A functional relationship for the VP has been developed for the range between 122 and 159.6 K. This relationship was also used to estimate a VP value at 88 K, which was below observable levels with a 0.1 torr gauge.

KW - 37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY

U2 - 10.2172/1908063

DO - 10.2172/1908063

M3 - Technical Report

CY - United States

ER -

Silicon Tetrafluoride Vapor Pressure Study

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