Silicon melt, regrowth, and amorphization velocities during pulsed laser irradiation

Michael O. Thompson; J. W. Mayer; A. G. Cullis; H. C. Webber; N. G. Chew; J. M. Poate; D. C. Jacobson

doi:10.1103/PhysRevLett.50.896

Silicon melt, regrowth, and amorphization velocities during pulsed laser irradiation

Michael O. Thompson
, J. W. Mayer
, A. G. Cullis
, H. C. Webber
, N. G. Chew
, J. M. Poate
, D. C. Jacobson

Research output: Contribution to journal › Article › peer-review

201 Scopus citations

Abstract

Direct experimental measurements of the melt-in, resolidification, and amorphization velocities for pulsed (2.5 to 10 ns) uv and ruby-laser irradiation have been made on 100 silicon on sapphire. An experimental value for the critical amorphization velocity in 100 Si has been measured as 15 m/s. Epitaxial resolidification was observed from 5 to 15 m/s. Additionally, melt-in velocities in excess of 200 m/s were observed for 2.5-ns ruby irradiation.

Original language	English
Pages (from-to)	896-899
Number of pages	4
Journal	Physical Review Letters
Volume	50
Issue number	12
DOIs	https://doi.org/10.1103/PhysRevLett.50.896
State	Published - 1983
Externally published	Yes

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10.1103/PhysRevLett.50.896

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title = "Silicon melt, regrowth, and amorphization velocities during pulsed laser irradiation",

abstract = "Direct experimental measurements of the melt-in, resolidification, and amorphization velocities for pulsed (2.5 to 10 ns) uv and ruby-laser irradiation have been made on 100 silicon on sapphire. An experimental value for the critical amorphization velocity in 100 Si has been measured as 15 m/s. Epitaxial resolidification was observed from 5 to 15 m/s. Additionally, melt-in velocities in excess of 200 m/s were observed for 2.5-ns ruby irradiation.",

author = "Thompson, \{Michael O.\} and Mayer, \{J. W.\} and Cullis, \{A. G.\} and Webber, \{H. C.\} and Chew, \{N. G.\} and Poate, \{J. M.\} and Jacobson, \{D. C.\}",

year = "1983",

doi = "10.1103/PhysRevLett.50.896",

language = "English",

volume = "50",

pages = "896--899",

journal = "Physical Review Letters",

issn = "0031-9007",

publisher = "American Physical Society",

number = "12",

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T1 - Silicon melt, regrowth, and amorphization velocities during pulsed laser irradiation

AU - Thompson, Michael O.

AU - Mayer, J. W.

AU - Cullis, A. G.

AU - Webber, H. C.

AU - Chew, N. G.

AU - Poate, J. M.

AU - Jacobson, D. C.

PY - 1983

Y1 - 1983

N2 - Direct experimental measurements of the melt-in, resolidification, and amorphization velocities for pulsed (2.5 to 10 ns) uv and ruby-laser irradiation have been made on 100 silicon on sapphire. An experimental value for the critical amorphization velocity in 100 Si has been measured as 15 m/s. Epitaxial resolidification was observed from 5 to 15 m/s. Additionally, melt-in velocities in excess of 200 m/s were observed for 2.5-ns ruby irradiation.

AB - Direct experimental measurements of the melt-in, resolidification, and amorphization velocities for pulsed (2.5 to 10 ns) uv and ruby-laser irradiation have been made on 100 silicon on sapphire. An experimental value for the critical amorphization velocity in 100 Si has been measured as 15 m/s. Epitaxial resolidification was observed from 5 to 15 m/s. Additionally, melt-in velocities in excess of 200 m/s were observed for 2.5-ns ruby irradiation.

UR - https://www.scopus.com/pages/publications/3643050259

U2 - 10.1103/PhysRevLett.50.896

DO - 10.1103/PhysRevLett.50.896

M3 - Article

AN - SCOPUS:3643050259

SN - 0031-9007

VL - 50

SP - 896

EP - 899

JO - Physical Review Letters

JF - Physical Review Letters

IS - 12

ER -

Silicon melt, regrowth, and amorphization velocities during pulsed laser irradiation

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