Silicon epitaxy using tetrasilane at low temperatures in ultra-high vacuum chemical vapor deposition

  • Ramsey Hazbun
  • , John Hart
  • , Ryan Hickey
  • , Ayana Ghosh
  • , Nalin Fernando
  • , Stefan Zollner
  • , Thomas N. Adam
  • , James Kolodzey

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

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Material Science

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Chemical Engineering