@inproceedings{428a415ef82e4884991c89dc22e41503,
title = "Si pillar structured thermal neutron detectors: Fabrication challenges and performance expectations",
abstract = "Solid-state thermal neutron detectors are desired to replace 3He tube tube-based technology for the detection of special nuclear materials. 3He tubes have some issues with stability, sensitivity to microphonics and very recently, a shortage of 3He. There are numerous solid-state approaches being investigated that utilize various architectures and material combinations. Our approach is based on the combination of high-aspect-ratio silicon PIN pillars, which are 2 μm wide with a 2 μm separation, arranged in a square matrix, and surrounded by 10B, the neutron converter material. To date, our highest efficiency is ∼ 20 \% for a pillar height of 26 μm. An efficiency of greater than 50 \% is predicted for our device, while maintaining high gamma rejection and low power operation once adequate device scaling is carried out. Estimated required pillar height to meet this goal is ∼ 50 μm. The fabrication challenges related to 10B deposition and etching as well as planarization of the three-dimensional structure is discussed.",
keywords = "Thermal neutron detector, boron-10, helium tube replacements, pillar",
author = "Nikolic, \{R. J.\} and Q. Shao and Voss, \{L. F.\} and Conway, \{A. M.\} and R. Radev and Wang, \{T. F.\} and M. Dar and N. Deo and Cheung, \{C. L.\} and L. Fabris and Britton, \{C. L.\} and Ericson, \{M. N.\}",
year = "2011",
doi = "10.1117/12.885880",
language = "English",
isbn = "9780819486059",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Micro- and Nanotechnology Sensors, Systems, and Applications III",
note = "Micro- and Nanotechnology Sensors, Systems, and Applications III ; Conference date: 25-04-2011 Through 29-04-2011",
}