Short range order variations in amorphous silicon

J. Fortner, J. S. Lannin

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Neutron diffraction measurements have been performed on two forms of amorphous Si prepared by low pressure rf sputtering and by subsequent annealing at 600C. Radial distribution studies on thick films indicate substantial changes in the second peak due to structural relaxation effects. Raman scattering measurements on these samples provide the first direct comparison between indirect and direct probes of bond angle disorder and its variation in the amorphous states of tetrahedral group IV systems.

Original languageEnglish
Pages (from-to)128-131
Number of pages4
JournalJournal of Non-Crystalline Solids
Volume106
Issue number1-3
DOIs
StatePublished - Dec 1 1988
Externally publishedYes

Funding

*Supported by NSF Grant DRM 8630391

FundersFunder number
National Science FoundationDRM 8630391

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