Abstract
We report on the fabrication and operation of integrated gated field emission devices using single vertically aligned carbon nanofiber (VACNF) cathodes where the gate aperture has been formed using a self-aligned technique based on chemical mechanical polishing. We find that this method for producing gated cathode devices easily achieves structures with gate apertures on the order of 2 μm that show good concentric alignment to the VACNF emitter. The operation of these devices was explored and field emission characteristics that fit well to the Fowler-Nordheim model of emission was demonstrated.
Original language | English |
---|---|
Pages (from-to) | 3660-3662 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 81 |
Issue number | 19 |
DOIs | |
State | Published - Nov 4 2002 |