Self-aligned gated field emission devices using single carbon nanofiber cathodes

M. A. Guillorn, A. V. Melechko, V. I. Merkulov, D. K. Hensley, M. L. Simpson, D. H. Lowndes

Research output: Contribution to journalArticlepeer-review

78 Scopus citations

Abstract

We report on the fabrication and operation of integrated gated field emission devices using single vertically aligned carbon nanofiber (VACNF) cathodes where the gate aperture has been formed using a self-aligned technique based on chemical mechanical polishing. We find that this method for producing gated cathode devices easily achieves structures with gate apertures on the order of 2 μm that show good concentric alignment to the VACNF emitter. The operation of these devices was explored and field emission characteristics that fit well to the Fowler-Nordheim model of emission was demonstrated.

Original languageEnglish
Pages (from-to)3660-3662
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number19
DOIs
StatePublished - Nov 4 2002

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