Secondary Ion Mass Spectral Imaging of Metals and Alloys

Yanjie Shen; Logan Howard; Xiao Ying Yu

doi:10.3390/ma17020528

Secondary Ion Mass Spectral Imaging of Metals and Alloys

Yanjie Shen, Logan Howard, Xiao Ying Yu

Advanced Nuclear Materials

Research output: Contribution to journal › Review article › peer-review

12 Scopus citations

Abstract

Secondary Ion Mass Spectrometry (SIMS) is an outstanding technique for Mass Spectral Imaging (MSI) due to its notable advantages, including high sensitivity, selectivity, and high dynamic range. As a result, SIMS has been employed across many domains of science. In this review, we provide an in-depth overview of the fundamental principles underlying SIMS, followed by an account of the recent development of SIMS instruments. The review encompasses various applications of specific SIMS instruments, notably static SIMS with time-of-flight SIMS (ToF-SIMS) as a widely used platform and dynamic SIMS with Nano SIMS and large geometry SIMS as successful instruments. We particularly focus on SIMS utility in microanalysis and imaging of metals and alloys as materials of interest. Additionally, we discuss the challenges in big SIMS data analysis and give examples of machine leaning (ML) and Artificial Intelligence (AI) for effective MSI data analysis. Finally, we recommend the outlook of SIMS development. It is anticipated that in situ and operando SIMS has the potential to significantly enhance the investigation of metals and alloys by enabling real-time examinations of material surfaces and interfaces during dynamic transformations.

Original language	English
Article number	528
Journal	Materials
Volume	17
Issue number	2
DOIs	https://doi.org/10.3390/ma17020528
State	Published - Jan 2024

Funding

ORNL is managed by UT-Battelle, LLC, for the U.S. Department of Energy (DOE) under contract number DE-AC05-00OR22725. This manuscript has been authored by UT-Battelle, LLC, under Contract No. DE-AC05-00OR22725 with the U.S. Department of Energy. The United States Government retains, and the publisher, by accepting the article for publication, acknowledges that the United States Government retains a non-exclusive, paid-up, irrevocable, worldwide license to publish or reproduce the published form of this manuscript or allow others to do so, for United States Government purposes. The Department of Energy will provide public access to these results of federally sponsored research in accordance with the DOE Public Access Plan ( http://energy.gov/downloads/doe-public-access-plan , accessed on 4 June 2023). The manuscript preparation for Xiao-Ying Yu was supported partially by the Strategic Laboratory Directed Research and Development (LDRD) of the Physical Sciences Directorate of the Oak Ridge National Laboratory (ORNL). The authors also acknowledge the Fusion Materials Research Program for support in manuscript development and revisions.

Keywords

Secondary Ion Mass Spectrometry (SIMS)
alloys
dynamic SIMS
imaging
mentals
static SIMS

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10.3390/ma17020528

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title = "Secondary Ion Mass Spectral Imaging of Metals and Alloys",

abstract = "Secondary Ion Mass Spectrometry (SIMS) is an outstanding technique for Mass Spectral Imaging (MSI) due to its notable advantages, including high sensitivity, selectivity, and high dynamic range. As a result, SIMS has been employed across many domains of science. In this review, we provide an in-depth overview of the fundamental principles underlying SIMS, followed by an account of the recent development of SIMS instruments. The review encompasses various applications of specific SIMS instruments, notably static SIMS with time-of-flight SIMS (ToF-SIMS) as a widely used platform and dynamic SIMS with Nano SIMS and large geometry SIMS as successful instruments. We particularly focus on SIMS utility in microanalysis and imaging of metals and alloys as materials of interest. Additionally, we discuss the challenges in big SIMS data analysis and give examples of machine leaning (ML) and Artificial Intelligence (AI) for effective MSI data analysis. Finally, we recommend the outlook of SIMS development. It is anticipated that in situ and operando SIMS has the potential to significantly enhance the investigation of metals and alloys by enabling real-time examinations of material surfaces and interfaces during dynamic transformations.",

keywords = "Secondary Ion Mass Spectrometry (SIMS), alloys, dynamic SIMS, imaging, mentals, static SIMS",

author = "Yanjie Shen and Logan Howard and Yu, \{Xiao Ying\}",

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year = "2024",

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doi = "10.3390/ma17020528",

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AU - Shen, Yanjie

AU - Howard, Logan

AU - Yu, Xiao Ying

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N2 - Secondary Ion Mass Spectrometry (SIMS) is an outstanding technique for Mass Spectral Imaging (MSI) due to its notable advantages, including high sensitivity, selectivity, and high dynamic range. As a result, SIMS has been employed across many domains of science. In this review, we provide an in-depth overview of the fundamental principles underlying SIMS, followed by an account of the recent development of SIMS instruments. The review encompasses various applications of specific SIMS instruments, notably static SIMS with time-of-flight SIMS (ToF-SIMS) as a widely used platform and dynamic SIMS with Nano SIMS and large geometry SIMS as successful instruments. We particularly focus on SIMS utility in microanalysis and imaging of metals and alloys as materials of interest. Additionally, we discuss the challenges in big SIMS data analysis and give examples of machine leaning (ML) and Artificial Intelligence (AI) for effective MSI data analysis. Finally, we recommend the outlook of SIMS development. It is anticipated that in situ and operando SIMS has the potential to significantly enhance the investigation of metals and alloys by enabling real-time examinations of material surfaces and interfaces during dynamic transformations.

AB - Secondary Ion Mass Spectrometry (SIMS) is an outstanding technique for Mass Spectral Imaging (MSI) due to its notable advantages, including high sensitivity, selectivity, and high dynamic range. As a result, SIMS has been employed across many domains of science. In this review, we provide an in-depth overview of the fundamental principles underlying SIMS, followed by an account of the recent development of SIMS instruments. The review encompasses various applications of specific SIMS instruments, notably static SIMS with time-of-flight SIMS (ToF-SIMS) as a widely used platform and dynamic SIMS with Nano SIMS and large geometry SIMS as successful instruments. We particularly focus on SIMS utility in microanalysis and imaging of metals and alloys as materials of interest. Additionally, we discuss the challenges in big SIMS data analysis and give examples of machine leaning (ML) and Artificial Intelligence (AI) for effective MSI data analysis. Finally, we recommend the outlook of SIMS development. It is anticipated that in situ and operando SIMS has the potential to significantly enhance the investigation of metals and alloys by enabling real-time examinations of material surfaces and interfaces during dynamic transformations.

KW - Secondary Ion Mass Spectrometry (SIMS)

KW - alloys

KW - dynamic SIMS

KW - imaging

KW - mentals

KW - static SIMS

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U2 - 10.3390/ma17020528

DO - 10.3390/ma17020528

M3 - Review article

AN - SCOPUS:85183320774

SN - 1996-1944

VL - 17

JO - Materials

JF - Materials

IS - 2

M1 - 528

ER -

Secondary Ion Mass Spectral Imaging of Metals and Alloys

Abstract

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Keywords

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