Secondary electron emission patterning of diamond with hydrogen and oxygen plasmas

Minseo Park, W. B. Choi, S. K. Streiffer, John J. Hren, Jerome J. Cuomo

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Secondary electron emission patterning of single crystal diamond surfaces with hydrogen and oxygen plasma treatments was demonstrated. Hydrogen plasma treated regions were much brighter than the oxygen terminated regions. Results of atomic force microscopy confirmed that the observed contrast is not topographical. Several other possible negative electron affinity (or low positive electron affinity) materials such as chemical vapor deposited (CVD) diamond, aluminum nitride, and tetrahedrally bonded amorphous carbon (txa-C1-x) were also investigated. Faint image contrast (patterning) was also observed from polycrystalline CVD diamond and polycrystalline aluminum nitride films; however, no contrast at all was obtained from tetrahedrally bonded amorphous carbon (txa-C1-x) films.

Original languageEnglish
Pages (from-to)2580-2582
Number of pages3
JournalApplied Physics Letters
Volume72
Issue number20
DOIs
StatePublished - 1998
Externally publishedYes

Fingerprint

Dive into the research topics of 'Secondary electron emission patterning of diamond with hydrogen and oxygen plasmas'. Together they form a unique fingerprint.

Cite this